EP0123212A2
Expired / Lapsed
EP
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Ceramic bonded structure and method of manufacturing the same
Assignee: Toshiba Corp
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Filing: 1984-04-11
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Granted: —
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Expires: 2004-04-11
Abstract
Abstract A ceramic bonded structure with a high bonding strength has a first member of a ceramic, a ceramic-modified bonding layerformed on at least a bonding surface ofthefirst member by a thermal treatment, a metal layer formed on the ceramic-modified bonding layer, and a second member of a ceramic or metal bonded with the first member through the metal layer.
Inventors
- 👤 Shun-Ichiro C/O Patent Division Tanaka
- 👤 Nobuyuki C/O Patent Division Mizunoya
- 👤 Shigeo C/O Patent Division Abe
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-06 17:50
CPC Classifications
C; C04; C04B; C04B37/00; C04B37/02; C04B37/023; C04B37/025; C04B37/003; C04B37/005; C04B37/006; C04B37/026; C04B2235/00; C04B2235/65; C04B2235/656; C04B2235/6567; C04B2237/00; C04B2237/02; C04B2237/04; C04B2237/06; C04B2237/062; C04B2237/064; C04B2237/12; C04B2237/124; C04B2237/126; C04B2237/30; C04B2237/32; C04B2237/36; C04B2237/365; C04B2237/366; C04B2237/368; C04B2237/40; C04B2237/405; C04B2237/406; C04B2237/50; C04B2237/54; C04B2237/70; C04B2237/708; C04B2237/72
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
54 words
A ceramic bonded structure comprising a first member of a ceramic and a second member bonded to said first member through a metal layer, characterized in that a ceramic-modified bonding layer is formed on at least a bonding surface of said first member, and said metal layer is formed on said ceramic-modified bonding layer.
Claim 2
Dependent Claim
54 words
A ceramic bonded structure comprising a first member of a ceramic and a second member bonded to said first member through a metal layer, characterized in that a ceramic-modified bonding layer is formed on at least a bonding surface of said first member, and said metal layer is formed on said ceramic-modified bonding layer.
Claim 3
Dependent Claim
20 words
A ceramic bonded structure according to claim 1, characterized in that said first member consists of a ceramic containing silicon.
Claim 4
Dependent Claim
30 words
A ceramic bonded structure according to claim 2, characterized in that the ceramic containing silicon is a member selected from the group consisting of silicon nitride, silicon carbide, and Sialon.
Claim 5
Dependent Claim
18 words
A ceramic bonded structure according to claim 2, characterized in that said ceramic-modified bonding layer comprises a silicate.
Claim 6
Dependent Claim
23 words
A ceramic bonded structure according to claim 1, characterized in that said ceramic-modified bonding layer has a thickness of 0.1 to 20 pm.
Claim 7
Dependent Claim
29 words
A ceramic bonded structure according to claim 1, characterized in that said metal layer consists essentially of a metal selected from the group consisting of copper and copper alloys.
Claim 8
Dependent Claim
22 words
A ceramic bonded structure according to claim 1, characterized in that said metal layer has a thickness of 10 µm or more.
Claim 9
Dependent Claim
23 words
A ceramic bonded structure according to claim 7, characterized in that said metal layer has a thickness of 30 pm to 2 mm.
Claim 10
Dependent Claim
22 words
A ceramic bonde.d structure according to claim 7, characterized in that said metal layer has a thickness of 50 to 300 µm.
Claim 11
Dependent Claim
32 words
A ceramic bonded structure according to claim 1, characterized in that said second member consists of a ceramic and a ceramic-modified bonding layer is formed on at least a bonding surface thereof.
Claim 12
Dependent Claim
18 words
A ceramic bonded structure according to claim 1, characterized in that said second member consists of a metal.
Claim 13
Dependent Claim
31 words
A ceramic bonded structure according to claim 11, characterized in that a surface of said second member is plated with a metal which can be bonded with said metal bonding layer.
Claim 14
Dependent Claim
26 words
A ceramic bonded structure according to claim 12, characterized in that said second member consists of iron alloy and has a surface thereof plated with nickel.
Claim 15
Independent Claim
120 words
A method of manufacturing a ceramic bonded structure, comprising the steps of: performing a first thermal treatment of a first member of a ceramic to modify a surface thereof and to form a ceramic-modified bonding layer thereon; performing the first thermal treatment of a second member of a ceramic to modify a surface thereof and to form a ceramic-modified bonding layer thereon; bringing said first and second members into contact with each other through a metal sheet interposed therebetween; and bonding said first and second members by performing a second thermal treatment at a temperature which allows a reaction between said metal sheet and said ceramic-modified bonding layers and is not higher than a melting point of said metal sheet.
Claim 16
Independent Claim
120 words
A method of manufacturing a ceramic bonded structure, comprising the steps of: performing a first thermal treatment of a first member of a ceramic to modify a surface thereof and to form a ceramic-modified bonding layer thereon; performing the first thermal treatment of a second member of a ceramic to modify a surface thereof and to form a ceramic-modified bonding layer thereon; bringing said first and second members into contact with each other through a metal sheet interposed therebetween; and bonding said first and second members by performing a second thermal treatment at a temperature which allows a reaction between said metal sheet and said ceramic-modified bonding layers and is not higher than a melting point of said metal sheet.
Claim 17
Dependent Claim
29 words
A method according to claim 14, characterized in that said first thermal treatment is performed in an oxidizing atmosphere at 1,200 to 1,400°C from 10 minutes to 20 hours.
Claim 18
Dependent Claim
23 words
A method according to claim 14, characterized in that said ceramic-modified bonding layer has a crystal grain of not more than 100 µm.
Claim 19
Dependent Claim
24 words
A method according to claim 14, characterized in that said first and second members contain the same or different types of ceramics containing silicon.
Claim 20
Dependent Claim
28 words
A method according to claim 17, characterized in that said ceramic containing silicon is a member selected from the group consisting of silicon nitride, silicon carbide, and Sialon.
Claim 21
Dependent Claim
27 words
A method according to claim 14, characterized in that said metal sheet consists essentially of a metal selected from the group consisting of copper and copper alloys.
Claim 22
Dependent Claim
20 words
A method according to claim 15, characterized in that said metal sheet has a thickness of 10 µm or more.
Claim 23
Dependent Claim
21 words
A method according to claim 20, characterized in that said metal sheet has a thickness of 30 µm to 2 mm.
Claim 24
Dependent Claim
20 words
A method according to claim 20, characterized in that said metal sheet has a thickness of 50 to 300 µm.
Claim 25
Independent Claim
112 words
A method of manufacturing a ceramic bonded structure, comprising the steps of: performing a first thermal treatment of a first member of a ceramic so as to modify a surface thereof and to form a ceramic-modified bonding layer thereon; bringing said ceramic-modified bonding layer into contact with a metal sheet; performing a second thermal treatment at a temperature at which said metal sheet and said ceramic-modified bonding layer react with each other and which is not higher than a melting point of a metal of said metal sheet so as to bond said ceramic-modified bonding layer and said metal sheet; and bonding a second member of a metal with said metal sheet.
Claim 26
Independent Claim
112 words
A method of manufacturing a ceramic bonded structure, comprising the steps of: performing a first thermal treatment of a first member of a ceramic so as to modify a surface thereof and to form a ceramic-modified bonding layer thereon; bringing said ceramic-modified bonding layer into contact with a metal sheet; performing a second thermal treatment at a temperature at which said metal sheet and said ceramic-modified bonding layer react with each other and which is not higher than a melting point of a metal of said metal sheet so as to bond said ceramic-modified bonding layer and said metal sheet; and bonding a second member of a metal with said metal sheet.
Claim 27
Dependent Claim
29 words
A method according to claim 23, characterized in that said first thermal treatment is performed in an oxidizing atmosphere at 1,200 to 1,400°C from 10 minutes to 20 hours.
Claim 28
Dependent Claim
20 words
A method according to claim 23, characterized in that said ceramic-modified layer has a thickness of 0.1 to 20 µm.
Claim 29
Dependent Claim
18 words
A method according to claim 23, characterized in that said first member consists of a ceramic containing silicon.
Claim 30
Dependent Claim
28 words
A method according to claim 26, characterized in that said ceramic containing silicon is a member selected from the group consisting of silicon nitride, silicon carbide and Sialon.
Claim 31
Dependent Claim
27 words
A method according to claim 23, characterized in that said metal sheet consists essentially of a metal selected from the group consisting of copper and copper alloys.
Claim 32
Dependent Claim
20 words
A method according to claim 23, characterized in that said metal sheet has a thickness of 10 µm or more.
Claim 33
Dependent Claim
21 words
A method according to claim 29, characterized in that said metal sheet has a thickness of 30 µm to 2 mm.
Claim 34
Dependent Claim
20 words
A method according to claim 29, characterized in that said metal sheet has a thickness of 50 to 300 µm.
References Cited (Backward Citations)
No citation records indexed.
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