EP0120307A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus and method for plasma treatment of resin material
Assignee: Toyota Motor Corp
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Filing: 1984-02-23
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Granted: —
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Expires: 2004-02-23
Abstract
Abstract An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprises a plurality of long plasma-irradiating tubular pipes, each of which is provided along the length thereof with numerous small holes for injecting plasma, and at least one plasma-irradiating straight pipe disposed with its free end opening toward a section to which the plasma is hard to flow. At least one second plasma-irradiating pipe is located movably to an optional position within the reaction chamber. A method for surface plasma-treatment comprises dividing a microwave generated in a magnetron in a plurality of microwaves by a distributor, introducing the divided microwaves into a plurality of plasma generating mechanisms, respectively, and introducing plasmas generated in the respective plasma generating mechanisms intothe reaction chamber through a plurality of plasma introducing ports, respectively, formed in the wall of the reaction chamber.
Inventors
- 👤 Kenji Fukuta
- 👤 Takaoki Kaneko
- 👤 Yoshinobu Takahashi
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 06:20
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32357; B; B29; B29C; B29C59/00; B29C59/14; H01J37/02; H01J37/18; B01; B01J; B01J2219/00; B01J2219/08; B01J2219/0894; B01J2219/19; B01J2219/194; B01J2219/1941; B01J2219/1942; B29K; B29K2023/00; H01J2237/00; H01J2237/18; H01J2237/182; H01J2237/1825; H01J2237/32; H01J2237/33; H01J2237/336
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
77 words
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprising a plurality of long plasma-irradiating tubular pipes, each of which is provided along the length thereof with numerous small holes for injecting plasma, and at least one plasma-irradiating straight pipe disposed with its free end opening toward a section to which the plasma is hard to flow.
Claim 2
Independent Claim
77 words
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprising a plurality of long plasma-irradiating tubular pipes, each of which is provided along the length thereof with numerous small holes for injecting plasma, and at least one plasma-irradiating straight pipe disposed with its free end opening toward a section to which the plasma is hard to flow.
Claim 3
Independent Claim
62 words
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprising at least one first plasma-irradiating pipe fixed to the inner wall of the reaction chamber, and at least one second plasma-irradiating pipe located movably to an optional position within the reaction chamber.
Claim 4
Independent Claim
62 words
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprising at least one first plasma-irradiating pipe fixed to the inner wall of the reaction chamber, and at least one second plasma-irradiating pipe located movably to an optional position within the reaction chamber.
Claim 5
Dependent Claim
21 words
An apparatus according to claim 2, wherein the plasma-irradiating pipe is connected to a plasma introducing port via a flexible tube.
Claim 6
Dependent Claim
48 words
An apparatus according to claim 2 or 3, wherein the plasma-irradiating pipe consists of a cylindrical pipe having numerous small plasma-injecting holes provided over the entire periphery of the pipe so as to irradiate plasma various radial directions with respect to the center axis of the cylindrical pipe.
Claim 7
Independent Claim
111 words
A method for surface plasma-treatment, capable of plasma-treating works of resin material, by generating a microwave discharge plasma at the outside of a reaction chamber, introducing the plasma into the reaction chamber, and irradiating the plasma on the works to be treated, comprising dividing a microwave generated in a magnetron in a plurality of microwaves by a distributor, introducing the divided microwaves into a plurality of plasma generating mechanisms, respectively, each including a plasma generating furnace and a plasma generating pipe, and introducing plasmas generated in the respective plasma generating mechanisms into the reaction chamber through a plurality of plasma introducing ports, respectively, formed in the wall of the reaction chamber.
Claim 8
Independent Claim
111 words
A method for surface plasma-treatment, capable of plasma-treating works of resin material, by generating a microwave discharge plasma at the outside of a reaction chamber, introducing the plasma into the reaction chamber, and irradiating the plasma on the works to be treated, comprising dividing a microwave generated in a magnetron in a plurality of microwaves by a distributor, introducing the divided microwaves into a plurality of plasma generating mechanisms, respectively, each including a plasma generating furnace and a plasma generating pipe, and introducing plasmas generated in the respective plasma generating mechanisms into the reaction chamber through a plurality of plasma introducing ports, respectively, formed in the wall of the reaction chamber.
Claim 9
Independent Claim
85 words
A method for surface plasma-treatment, capable of plasma-treating works of resin material, by generating a microwave discharge plasma at the outside of a reaction chamber, introducing the plasma into the reaction chamber, and irradiating the plasma on the works to be treated, comprising, before introducing the generated plasma into the reaction chamber, supplying it into a plurality of branch passages, and introducing the branched plasmas into the reaction chamber through a plurality of plasma introducing ports, respectively, provided in the wall of the reaction chamber.
Claim 10
Independent Claim
85 words
A method for surface plasma-treatment, capable of plasma-treating works of resin material, by generating a microwave discharge plasma at the outside of a reaction chamber, introducing the plasma into the reaction chamber, and irradiating the plasma on the works to be treated, comprising, before introducing the generated plasma into the reaction chamber, supplying it into a plurality of branch passages, and introducing the branched plasmas into the reaction chamber through a plurality of plasma introducing ports, respectively, provided in the wall of the reaction chamber.
Claim 11
Independent Claim
39 words
A method for applying surface plasma-treatment to resin material placed in a reaction chamber by irradiating on works to be treated with discharge plasma, characterized in that both radio wave and microwave discharge plasmas are irradiated to the works.
Claim 12
Independent Claim
39 words
A method for applying surface plasma-treatment to resin material placed in a reaction chamber by irradiating on works to be treated with discharge plasma, characterized in that both radio wave and microwave discharge plasmas are irradiated to the works.
Claim 13
Dependent Claim
23 words
A method according to claim 7, wherein the microwave discharge plasma is irradiated toward the portions where the radio-wave discharge plasma insufficiently reach.
Claim 14
Independent Claim
43 words
A method for applying surface plasma-treatment to resin material placed in a vacuum reaction chamber by irradiating on works to be treated with discharge plasma, characterized in that the reaction chamber is evacuated through a combined function of hydraulic and mechanical booster pumps.
Claim 15
Independent Claim
43 words
A method for applying surface plasma-treatment to resin material placed in a vacuum reaction chamber by irradiating on works to be treated with discharge plasma, characterized in that the reaction chamber is evacuated through a combined function of hydraulic and mechanical booster pumps.
Claim 16
Dependent Claim
63 words
A method according to claim 9, wherein the reaction chamber is first evacuated roughly from the atmospheric pressure by the hydraulic pumps and then evacuated by the mechanical booster pump to the vacuum pressure of 0.01 to 1 Torr which is lower than the maximum suction pressure thereof, thereafter plasma-treatment is carried out by supplying oxygen gas or a mixed gas containing oxygen.
Claim 17
Independent Claim
50 words
A method for applying surface plasma-treatment to resin material placed in a vacuum reaction chamber by irradiating on works to be treated with discharge plasma, characterized in that the reaction chamber is evacuated through a combined function of a hydraulic pump, an oil rotary pump, and a mechanical booster pumps.
Claim 18
Independent Claim
50 words
A method for applying surface plasma-treatment to resin material placed in a vacuum reaction chamber by irradiating on works to be treated with discharge plasma, characterized in that the reaction chamber is evacuated through a combined function of a hydraulic pump, an oil rotary pump, and a mechanical booster pumps.
Claim 19
Dependent Claim
72 words
A method according to claim 11, wherein the reaction chamber is first evacuated roughly from the atmospheric pressure by the hydraulic and oil rotary pumps, and then evacuated by the mechanical booster pump to the vacuum pressure of 0.01 to 1 Torr which is lower than the maximum suction pressure thereof, thereafter oil rotary pumps are stopped and plasma-treatment is carried out by supplying oxygen gas or a mixed gas containing oxygen.
Claim 20
Independent Claim
113 words
A method for applying surface plasma-treatment to resin material placed in a vacuum reaction chamber by irradiating on works to be treated with low-temperature plasma, which is generated by energizing a gas, such as oxygen, nitrogen, argon, helium, or a mixed gas thereof, with electro discharge, such as microwave discharge, characterized in that the interior of the reaction chamber is maintained in a vacuum state of 100 Torr or less, preferably, 0.1 to 10 Torr, at least during the radiation of the plasma and the relation between the volume V (k) of the reaction chamber, the plasma, introducing rate Q (t/sec) and the duration of plasma radiation t (sec) meets the followinq inequality:
Claim 21
Independent Claim
113 words
A method for applying surface plasma-treatment to resin material placed in a vacuum reaction chamber by irradiating on works to be treated with low-temperature plasma, which is generated by energizing a gas, such as oxygen, nitrogen, argon, helium, or a mixed gas thereof, with electro discharge, such as microwave discharge, characterized in that the interior of the reaction chamber is maintained in a vacuum state of 100 Torr or less, preferably, 0.1 to 10 Torr, at least during the radiation of the plasma and the relation between the volume V (k) of the reaction chamber, the plasma, introducing rate Q (t/sec) and the duration of plasma radiation t (sec) meets the followinq inequality:
Claim 22
Independent Claim
62 words
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprising plasma transporting pipe made of stainless steel for transporting the plasma to the reaction chamber, and a plasma irradiating pipe also made of stainless steel for irradiating plasma within the reaction chamber.
Claim 23
Independent Claim
62 words
An apparatus for plasma treatment, capable of plasma-treating works of resin material by irradiating the surfaces of the works with a microwave discharge plasma within a vacuum reaction chamber, comprising plasma transporting pipe made of stainless steel for transporting the plasma to the reaction chamber, and a plasma irradiating pipe also made of stainless steel for irradiating plasma within the reaction chamber.
References Cited (Backward Citations)
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