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EP0120102A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Temperature measuring device

Assignee: Carl Zeiss SMT GmbH
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Filing: 1983-03-23
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Granted: —
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Expires: 2003-03-23
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Abstract

Abstract The measuring device consists of a measuring amplifier (4), to which, apart from the measuring shunts (RM), two reference resistors (R1, R2) are connected via multiplexers (3), and of a control computer (6), which is connected downstream of the measuring amplifier (4) and controls the multiplexer (3) and thus sequentially connects the measuring shunts and reference resistors to the measuring amplifier (4) in each measurement cycle. The voltage drops generated by a constant current source (1) at the resistors are further processed, after amplification in the measuring amplifier (4), in order to determine the measuring temperature in the computer (6), the computer (6) dividing the difference of the voltages of a measuring shunt (RM) and a reference resistors (R1) by the difference of the voltages of two reference resistors (R2 and R1). This measure means that the measurement result is independent of the operational state of the measuring amplifier (4). <IMAGE>

Inventors

  • 👤 Karl-Eugen Dipl.-Ing. Aubele

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-02 17:53
CPC Classifications
G; G01; G01K; G01K7/00; G01K7/16; G01K7/18; G01K7/20; G01K7/21

Claims Analysis

Total Claims: 0
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References Cited (Backward Citations)

FR2369568A1 Cited
WO1982003121A1 Cited

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