EP0112492A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Alarm and control system for semiconductor manufacturing plants
Assignee: Nohmi Bosai Ltd
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Filing: 1983-11-19
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Granted: —
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Expires: 2003-11-19
Abstract
Abstract This invention relates to an alarm and control system for semiconductor manufacturing plants which is capable of detecting the leaking processing gas both in gaseous state and in a state that it is generating combustion products as a result of its reaction with oxigen in air and combustion, and of performing adequate controls before or in incipient stage of fire.
Inventors
- 👤 Shoichi C/O Nohmi Bosai Kogyo Co. Ltd. Kimura
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 17:15
CPC Classifications
G; G08; G08B; G08B17/00; G08B17/10; G08B17/117
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
107 words
An alarm and control system for semi-conductor factories or the like characterized in that at locations where poisonous and inflammable treatment gases such as silane gas, etc. are used as in the manufacturing process of semi-conductors, etc. gas detectors to detect the leakage of said treatment gases and fire detectors to detect products of combustion of said treatment gases are provided, and that any changes in output of either said gas detectors or said fire detectors cause an alarm to issue and the control of a protection device such as a fire extinguishing device as well as the control of said manufacturing process of said semi-conductors, etc.
Claim 2
Dependent Claim
107 words
An alarm and control system for semi-conductor factories or the like characterized in that at locations where poisonous and inflammable treatment gases such as silane gas, etc. are used as in the manufacturing process of semi-conductors, etc. gas detectors to detect the leakage of said treatment gases and fire detectors to detect products of combustion of said treatment gases are provided, and that any changes in output of either said gas detectors or said fire detectors cause an alarm to issue and the control of a protection device such as a fire extinguishing device as well as the control of said manufacturing process of said semi-conductors, etc.
Claim 3
Dependent Claim
37 words
An alarm and control system for semi-conductor factories or the like as claimed in claim 1 wherein a. fire detectors which have inverters provided at their outputs and said gas detectors are installed in an exhaust duct.
Claim 4
Dependent Claim
38 words
An alarm and control system for semi-conductor factories or the like as claimed in claim 1 wherein said gas detectors and said fire detectors are installed in a housing in which cylinders of said treating gases are housed.
Claim 5
Dependent Claim
34 words
An alarm and control system for semi-conductor factories or the like as claimed in any one of claims 1 to 3 wherein the detecting element of said gas detector comprises a metal cxide semi-conductor.
Claim 6
Dependent Claim
31 words
An alarm and control system for. semi-conductor factories or the like as claimed in any one of claims 1 to 3 wherein said fire detector is an ionization type smoke detector.
References Cited (Backward Citations)
No citation records indexed.
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