EP0108206A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Vacuum Chamber
Assignee: International Business Machines Corp
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Filing: 1983-08-23
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Granted: —
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Expires: 2003-08-23
Abstract
Abstract 5 The apparatus features an energy coaxial feedthrough (52) fix-mounted in a wall (23) of a vacuum chamber (28) for supplying electrical and mechanical energy from sources located externally of the vacuum chamber to a substrate holder (44) within the vacuum chamber. The apparatus includes a movable coaxial coupler (54) capable of releasably engaging the coaxial feedthrough and releasably latching a substrate holder (44). The apparatus also includes a linkage assembly (56) located within the chamber connected to the coupler so that the coupler may be located in a first position proximate an access port (30) in the chamber wall to facilitate quick and convenient loading of the substrate holder and a second position in which the coupler is connected to the feedthrough for transmitting electrical and mechanical energy to the substrate holder and the substrates thereon.
Inventors
- 👤 William Walter Brown
- 👤 Gerhard Paul Dahlke
- 👤 Francis Theodore Lupul
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-26 13:32
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; F; F16; F16J; F16J15/00; F16J15/16; F16J15/40; F16J15/43; H01; H01J; H01J37/00; H01J37/02; H01J37/18
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
131 words
Apparatus for removably mounting and coupling mechanical and electrical energy to a movable, substrate carrying holder (44) in a vacuum chamber (28), comprising: a feedthrough (52) mounted on the chamber for transmitting electrical and mechanical energy from outside the chamber to inside the chamber; a coupler (54) for releasably engaging the feedthrough and the holder for supplying electrical and mechanical energy from the feedthrough to the holder; and a linkage assembly (56) mounted within the chamber and connected to the coupler for locating the coupler in a first position at which the holder may be mounted to the coupler and in a second position at which the coupler may be connected to the feedthrough so that electrical and mechanical energy may be supplied to the holder during processing of the substrates.
Claim 2
Dependent Claim
131 words
Apparatus for removably mounting and coupling mechanical and electrical energy to a movable, substrate carrying holder (44) in a vacuum chamber (28), comprising: a feedthrough (52) mounted on the chamber for transmitting electrical and mechanical energy from outside the chamber to inside the chamber; a coupler (54) for releasably engaging the feedthrough and the holder for supplying electrical and mechanical energy from the feedthrough to the holder; and a linkage assembly (56) mounted within the chamber and connected to the coupler for locating the coupler in a first position at which the holder may be mounted to the coupler and in a second position at which the coupler may be connected to the feedthrough so that electrical and mechanical energy may be supplied to the holder during processing of the substrates.
Claim 3
Dependent Claim
40 words
The apparatus of claim 1, wherein each the feedthrough (52) and the coupler (54) include drive shafts (82, 152) provided with connectors that permit rotational and electrical mating of the drive shafts within one revolution of the feedthrough drive shaft.
Claim 4
Dependent Claim
28 words
The apparatus of claim 2, wherein the linkage assembly (56) includes a latch (212) for retaining the coupler drive shaft (152) and feedthrough drive shaft (82) in engagement.
Claim 5
Dependent Claim
76 words
The apparatus of claim 1, wherein the chamber (28) includes a wall '(23) through which the feedthrough (52) passes, the feedthrough being adapted to provide R.F. and D.C. electrical energy and rotational mechanical energy from sources (85) located externally of the chamber to the coupler (52), located internally of the chamber, the coupler in turn supplying the R.F. and/or D.C. electrical energy and rotation of mechanical energy to the holder (44) located internally of the chamber.
Claim 6
Dependent Claim
70 words
The apparatus of claim 4, wherein the coupler (52) includes a housing (130) having a drive shaft (152) rotationally mounted therein and electrically isolated therefrom, the drive shaft forming an electrode for conducting electrical energy from the feedthrough (52) to the holder (44), the drive shaft having a connector (160) at a first end for engaging the feedthrough and a latch (174) at the second end for engaging the holder.
Claim 7
Dependent Claim
36 words
The apparatus of claim 5, wherein the coupler drive shaft (152) is mounted in a ball bearing assembly, the ball bearing assembly (154, 156) being mounted in an insulating bushing (146) within the coupler housing (130).
Claim 8
Dependent Claim
103 words
The apparatus of claim 5, wherein the feedthrough (52) includes a housing (60) for sealably mounting the feedthrough to the vacuum chamber wall (23), the feedthrough also including a drive shaft (82) rotatably mounted in the feedthrough housing for transmitting rotational energy from a source external to the chamber (28) to the coupler (54) within the chamber, the drive shaft also forming an electrode for conducting electrical energy from a source external to the chamber to the coupler within the chamber and having a spring loaded connector (84) at a first drive shaft end for resiliently engaging the coupler drive shaft connector (160).
Claim 9
Dependent Claim
72 words
The apparatus of claim 7, wherein the coupler drive shaft connector (160) is provided with a face (162) having ramped engagements (164) for receiving companion drive lugs (124) provided at the feedthrough drive shaft connector (160), the connectors of the feedthrough and coupler drive shafts, respectively, being arranged such that the drive lugs of the feedthrough connector align with and engage the coupler connector within one revolution of feedthrough drive shaft rotation.
Claim 10
Dependent Claim
102 words
The apparatus of claim 8, wherein the chamber includes an access port (30) in the chamber wall - (23) to facilitate the introduction and mounting of the holder (44) and substrates in the chamber (28), and wherein the linkage assembly (56) includes a body (206) fix-mounted to the chamber wall and linkage elements (210) having first ends (234) rotationally mounted to the assembly body (206) and second ends (236) rotationally mounted to the coupler (54) such that the coupler may be moved from a first location proximate the chamber access port (30) to a second location in engagement with the feedthrough (52).
Claim 11
Dependent Claim
25 words
The apparatus of claim 9, wherein the linkage assembly (56) includes a latch (212) for locking the coupler (54) in engagement with the feedthrough (52).
References Cited (Backward Citations)
No citation records indexed.
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