Fiber optic scanning system for laser/thermal inspection
Abstract
Abstract An apparatus for inspecting a device (10) made up of a plurality of different infrared radiating elements (12) includes an optical head (14) which is moveable along X-Y coordinates above the fixed device (10) to sequentially scan the infrared radiating elements (12). A laser beam source (16) is operatively connected to the moveable head (14) for injecting thermal energy into the infrared radiating elements (12) and an infrared detector (22) is provided for sensing the infrared radiation emanating from the elements (12). The infrared detector (22) may be mounted directly on the moveable head (14) or in a remote location wherein the detector (22) would be connected to the moveable head (14) by a flexible optical fiber (24). A second moveable head may be located on the opposite side of the device so that thermal energy from the laser source may be injected into opposite sides of the infrared radiating element.
Inventors
- 👤 Riccardo Vanzetti
- 👤 Ashod S. Dostoomian
- 👤 Alan C. Traub
Bibliographic Details
Claims Analysis
Total Claims: 6References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.