EP0100634A2
Expired / Lapsed
EP
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Method and apparatus for handling a charged particle beam
Assignee: Individual
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Filing: 1983-07-22
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Granted: —
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Expires: 2003-07-22
Abstract
Abstract In a method of and an apparatus for handling a charged particle beam, at least one of a signal representative of the astigmatism and a signal for correction of the astigmatism is obtained by computation on the basis of values detected under a certain condition from signal particles derived from an object which is moved repeatedly in at least two directions with respect to a charged particle beam. The amount and direction of astigmatism thus computed are displayed respectively for manual correction. Astigmatism correction and focusing can be also carried out automatically.
Inventors
- 👤 Tadao Suganuma
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:32
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/02; H01J37/04; H01J37/153
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
130 words
A method for handling a charged particle beam, comprising the steps of: (a) effecting a relative movement of an object and the charged particle beam repeatedly in at least two directions within a plane transverse to the axis of the charged particle beam; (b) adjusting the focus of the charged particle beam on the object to obtain signal particles derived from the object;. (c) detecting, on the basis of said signal particles, the focus adjusting condition that minimizes the cross-sectional component of the charged particle beam in the individual direction of the movement thereof on the object; and (d) computing, on the basis of the values thus detected, at least one of a signal representing the astigmatism of the charged particle beam and a signal for correction of the astigmatism.
Claim 2
Independent Claim
130 words
A method for handling a charged particle beam, comprising the steps of: (a) effecting a relative movement of an object and the charged particle beam repeatedly in at least two directions within a plane transverse to the axis of the charged particle beam; (b) adjusting the focus of the charged particle beam on the object to obtain signal particles derived from the object;. (c) detecting, on the basis of said signal particles, the focus adjusting condition that minimizes the cross-sectional component of the charged particle beam in the individual direction of the movement thereof on the object; and (d) computing, on the basis of the values thus detected, at least one of a signal representing the astigmatism of the charged particle beam and a signal for correction of the astigmatism.
Claim 3
Independent Claim
134 words
An apparatus for handling a charged particle beam, comprising: (a) means for effecting a relative movement of the charged particle beam and an object repeatedly within a plane transverse to the axis of the charged particle beam; (b) means for switching said movement to at least two directions; (c) means for adjusting the focus of the charged particle beam on the object ; (d) a detector for detecting signal particles derived from the object; (e) a device for displaying the sharpness of the waveform of the signal detected; and (f) means for (1) storing, with regard to the individual directions of said movement, the condition of said focus adjusting means at the time of minimizing the cross-sectional component of the charged particle beam in the direction of the movement thereof on the object, and
Claim 4
Independent Claim
134 words
An apparatus for handling a charged particle beam, comprising: (a) means for effecting a relative movement of the charged particle beam and an object repeatedly within a plane transverse to the axis of the charged particle beam; (b) means for switching said movement to at least two directions; (c) means for adjusting the focus of the charged particle beam on the object ; (d) a detector for detecting signal particles derived from the object; (e) a device for displaying the sharpness of the waveform of the signal detected; and (f) means for (1) storing, with regard to the individual directions of said movement, the condition of said focus adjusting means at the time of minimizing the cross-sectional component of the charged particle beam in the direction of the movement thereof on the object, and
Claim 5
Dependent Claim
31 words
(2) computing, on the basis of the stored contents, at least one of a signal representing the astigmatism of the charged particle beam and a signal for correction of the astigmatism.
Claim 6
Dependent Claim
31 words
(2) computing, on the basis of the stored contents, at least one of a signal representing the astigmatism of the charged particle beam and a signal for correction of the astigmatism.
Claim 7
Independent Claim
176 words
An apparatus for handling a charged particle beam, comprising: (a) means for effecting a relative movement of the charged particle beam and an object repeatedly within a plane transverse to the axis of the charged particle beam; (b) means for switching said movement to at least two directions; (c) means for adjusting the focus of the charged particle beam on the object; (d) a detector for detecting signal particles derived from the object; and (e) means for (1) comparatively judging, from the waveform of the signal detected, the amount of the cross-sectional component of the charged particle beam in the direction of movement thereof on the object, then (2) storing, with regard to the individual directions of said movement, the condition of said focus adjusting means at the time of minimizing said beam component in the direction of the movement thereof on the object, and (3) computing, by the use of the stored contents, at least one of a signal representing the astigmatism of the charged particle beam and a signal for correction of the astigmatism.
Claim 8
Independent Claim
176 words
An apparatus for handling a charged particle beam, comprising: (a) means for effecting a relative movement of the charged particle beam and an object repeatedly within a plane transverse to the axis of the charged particle beam; (b) means for switching said movement to at least two directions; (c) means for adjusting the focus of the charged particle beam on the object; (d) a detector for detecting signal particles derived from the object; and (e) means for (1) comparatively judging, from the waveform of the signal detected, the amount of the cross-sectional component of the charged particle beam in the direction of movement thereof on the object, then (2) storing, with regard to the individual directions of said movement, the condition of said focus adjusting means at the time of minimizing said beam component in the direction of the movement thereof on the object, and (3) computing, by the use of the stored contents, at least one of a signal representing the astigmatism of the charged particle beam and a signal for correction of the astigmatism.
References Cited (Backward Citations)
No citation records indexed.
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