EP0095372A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Optimum surface contour for conductive heat transfer with a thin flexible workpiece
Assignee: Varian Medical Systems Inc
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Filing: 1983-05-23
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Granted: —
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Expires: 2003-05-23
Abstract
Abstract Conductive heat transfer between a thin deformable workpiece 72 and a heat sink 70 is optimized by imposing a load L over the workpiece resulting in a uniform contact pressure distribution in said workpiece which is also the maximum stress consistent with the elastic properties of the workpiece. The surface 71 of the heat sink is given a contour determined by these criteria for a thin circular disk clamped thereto.
Inventors
- 👤 Scott Carleton Holden
- 👤 Peter R. Hanley
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:35
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7606; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H10P72/7611
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
92 words
Apparatus for the removal of heat from a planar article under irradiation comprising: a radiation source for directing a flux of radiation over said article, heat sink means for removal of heat incident on said heat sink, and characterised by clamping means (74,88) for securing a peripheral portion of said planar article to a nonplanar convex contoured surface (64,70,80) of said heat sink, whereby said planar article (62,72,82) is deformed conformally to said contoured surface, said contour imposing uniformity of contact pressure over said wafer surface in contact with said contoured surface.
Claim 2
Dependent Claim
92 words
Apparatus for the removal of heat from a planar article under irradiation comprising: a radiation source for directing a flux of radiation over said article, heat sink means for removal of heat incident on said heat sink, and characterised by clamping means (74,88) for securing a peripheral portion of said planar article to a nonplanar convex contoured surface (64,70,80) of said heat sink, whereby said planar article (62,72,82) is deformed conformally to said contoured surface, said contour imposing uniformity of contact pressure over said wafer surface in contact with said contoured surface.
Claim 3
Dependent Claim
24 words
The apparatus of claim 1 wherein said peripheral portion comprises a narrow continuous region at the periphery of said contoured surface of said article.
Claim 4
Dependent Claim
23 words
The apparatus of claim 1 wherein said peripheral portion comprises a plurality of discrete clamping sites distributed along the periphery of said surface.
Claim 5
Dependent Claim
81 words
Apparatus as claimed in any one of claims 1 to 3 in combination with said planar article from which heat is to be removed, characterised in that said article is a thin planar disc of radius r and thickness t and said contour has the general mathematical form y (r) =α (r 4 - β r 2 ) where α and β are constants, and y is the elevation of said contour from the radial plane at the radial coordinate r.
Claim 6
Dependent Claim
35 words
The combination as claimed in claim 4 wherein said clamping means cooperates with said contour surface to produce a tensile stress component at the outer convex surface of said disc which approaches the elastic limit.
Claim 7
Dependent Claim
30 words
The combination of claim 4 or claim 5 wherein the quantity« is given by and the quantity β is given by where ν is Poisson's ratio for said planar article.
Claim 8
Independent Claim
59 words
The method of optimizing transfer of heat by conduction between a thin deformable workpiece and a heat sink surface characterised by (a) clamping a peripheral portion of said workpiece to portion of said heat sink surface, (b) deforming said workpiece against said heat sink surface, (c) maintaining a uniform contact pressure between said workpiece and said heat sink surface.
Claim 9
Independent Claim
59 words
The method of optimizing transfer of heat by conduction between a thin deformable workpiece and a heat sink surface characterised by (a) clamping a peripheral portion of said workpiece to portion of said heat sink surface, (b) deforming said workpiece against said heat sink surface, (c) maintaining a uniform contact pressure between said workpiece and said heat sink surface.
Claim 10
Dependent Claim
21 words
The method of claim 7, wherein said step of deforming comprises stressing said workpiece to approach the limiting elastic stress thereof.
References Cited (Backward Citations)
No citation records indexed.
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