Patent US952587A successfully refreshed from Google Patents.
EP0095367A2
Expired / Lapsed
EP
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Rapid pumpdown for high vacuum processing
Assignee: Varian Medical Systems Inc
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Filing: 1983-05-23
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Granted: —
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Expires: 2003-05-23
Abstract
Abstract Articles for irradiation are introduced from atmospheric pressure through a vacuum lock 62. 64 to a high vacuum environment for processing. The maintenance of low operating pressure while water vapor is released from the surfaces of the lock and the article is principally achieved by a separate pumping device operating in the high vacuum enclosure, which device preferably takes the form of a large cryo-panel 68. The cryo-panel 68 can be electrically isolated from ground to provide a charge collection surface within a Faraday cage for ion implantation processing of the article.
Inventors
- 👤 Scott Carleton Holden
- 👤 Norman Leonard Turner
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 19:55
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3171; H01J37/02; H01J37/18
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
127 words
A cyclic processing system for charged particles radiation treatment of a plurality of objects in series series, said objects loaded from ambient pressure to said processing system at high vacuum, characterised by a source 8 of charged particles for irradiating each said object, a processing chamber 46 and means 52,54 for serially introducing each said object into said processing chamber, said processing chamber further comprising first pumping means 66 for evacuating residual gases other than water vapor to less than a preselected pressure within a preselected time interval and second pumping means 68,82 concurrently operative with said first pumping means for removal of water vapor from the residual gases within said chamber to a partial pressure less than a preselected upper limit within said preselected time interval.
Claim 2
Dependent Claim
127 words
A cyclic processing system for charged particles radiation treatment of a plurality of objects in series series, said objects loaded from ambient pressure to said processing system at high vacuum, characterised by a source 8 of charged particles for irradiating each said object, a processing chamber 46 and means 52,54 for serially introducing each said object into said processing chamber, said processing chamber further comprising first pumping means 66 for evacuating residual gases other than water vapor to less than a preselected pressure within a preselected time interval and second pumping means 68,82 concurrently operative with said first pumping means for removal of water vapor from the residual gases within said chamber to a partial pressure less than a preselected upper limit within said preselected time interval.
Claim 3
Dependent Claim
22 words
The system of claim 1 wherein said second pumping means comprises a cryo-pump 68 disposed in proximity to said object under irradiation.
Claim 4
Dependent Claim
50 words
The system of claim 2 wherein said cryo-pump comprises at least one surface in thermal communication with a coolant channel 72, a refrigerant circulating in said coolant channel and a refrigeration means 82 for maintaining said refrigerant at a mean temperature in the range from - 125°C to - 150°C.
References Cited (Backward Citations)
No citation records indexed.
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