EP0095200A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Plasma reactor removeable insert
Assignee: Motorola Solutions Inc
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Filing: 1983-05-06
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Granted: —
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Expires: 2003-05-06
Abstract
Abstract An improved plasma reaction chamber is described in which the interior electrode is readily removed. The interior electrode may comprise a variety of materials, including metallized plastic, thus enabling a disposable electrode and a greater variety of plasmas to be used.
Inventors
- 👤 Josef T. Hoog
- 👤 James W. Mitzel
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 04:23
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32532; H01J37/32605
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
40 words
Plasma reactor apparatus comprising a frame member (51); a shell body (52) secured to said frame member; an electrode (56) which fits within said shell; and retaining means (53, 54) attached to said body for holding said electrode in place.
Claim 2
Dependent Claim
40 words
Plasma reactor apparatus comprising a frame member (51); a shell body (52) secured to said frame member; an electrode (56) which fits within said shell; and retaining means (53, 54) attached to said body for holding said electrode in place.
Claim 3
Dependent Claim
53 words
The apparatus of claim 1 wherein said shell defines a first plenum having a plurality of passageways communicating therewith and defines a counterbore having a shoulder portion, wherein said electrode rests on and is located within said chamber body by said shoulder; and wherein said counterbore and said electrode defines a second plenum.
Claim 4
Dependent Claim
27 words
The apparatus as set forth in claim 2 wherein said electrode comprises a plurality of through-bores in the central portion thereof for communicating with said second plenum.
Claim 5
Dependent Claim
25 words
The apparatus as set forth in claim 3 wherein said electrode comprises a second plurality of-through-bores about the periphery thereof for communicating with said passageways.
Claim 6
Dependent Claim
45 words
The apparatus as set forth in claim 4 wherein said electrode comprises a reduced thickness portion about the periphery thereof to define an annular chamber between said reduced thickness portion and said shell, said annular chamber interconnecting said passageways and said second plurality of through-bores.
Claim 7
Dependent Claim
28 words
The apparatus as set forth in claim 2 wherein said shoulder portion includes sealing means for engaging a major surface of said electrode thereby sealing said second plenum.
Claim 8
Dependent Claim
68 words
An easily removed electrode for a plasma reactor comprising: a plain electrode member having first and second major surfaces; said member defining a first and a second plurality of bores, said first plurality of bores extending from one major surface to the other in a predetermined pattern in the central portion of said member; and said second plurality of bores being disposed about the periphery of said member.
Claim 9
Dependent Claim
68 words
An easily removed electrode for a plasma reactor comprising: a plain electrode member having first and second major surfaces; said member defining a first and a second plurality of bores, said first plurality of bores extending from one major surface to the other in a predetermined pattern in the central portion of said member; and said second plurality of bores being disposed about the periphery of said member.
Claim 10
Dependent Claim
20 words
The electrode as set forth in claim 7 wherein said member comprises a reduced thickness portion about the periphery thereof.
Claim 11
Dependent Claim
20 words
The electrode as set forth in claim 8 wherein said second plurality of bores extend through said reduced thickness portion.
Claim 12
Dependent Claim
17 words
The electrode as set forth in claim 9 wherein said second plurality of bores are distributed uniformly.
References Cited (Backward Citations)
No citation records indexed.
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