EP0094835A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Apparatus for investigation of a surface
Assignee: National Research Development Corp UK
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Filing: 1983-05-17
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Granted: —
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Expires: 2003-05-17
Abstract
Abstract A microscope used to investigate the profile of a surface (28) comprises a laser light source (10) from which a beam of radiation passes through a collimator (12) and polariser (16). Orthogonally polarised components are focused at different positions by a birefringent lens system (22, 26). Light reflected by the surface is passed to a photodetector (36) which passes an output signal to an analyser circuit (not shown).
Inventors
- 👤 Michael John Downs
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 15:10
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/30; G01B11/303; G01B11/02; G01B11/06; G01B11/0608
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
95 words
Apparatus for investigating the properties of a surface comprising means for generating a collimated beam of radiation having components of equal amplitude in two orthogonal directions nf polarisation, birefringent focusing means for focusing radiation in two directions of polarisation at different positions along the optical axis of the apparatus, axial scanning means for altering said positions with respect to the surface under investigation and -phase-sensitive detector means to receive radiation from the surface and comparator means to compare corresponding parameters of radiation received from the surface in each of said two orthogonal directions of polarisation.
Claim 2
Dependent Claim
95 words
Apparatus for investigating the properties of a surface comprising means for generating a collimated beam of radiation having components of equal amplitude in two orthogonal directions nf polarisation, birefringent focusing means for focusing radiation in two directions of polarisation at different positions along the optical axis of the apparatus, axial scanning means for altering said positions with respect to the surface under investigation and -phase-sensitive detector means to receive radiation from the surface and comparator means to compare corresponding parameters of radiation received from the surface in each of said two orthogonal directions of polarisation.
Claim 3
Dependent Claim
32 words
Apparatus for investigating the properties of a surface as claimed in Claim 1 wherein said birefringent focusing means comprises a relatively low power bi-refringent lens and a relatively high power non-birefringent lens.
Claim 4
Dependent Claim
43 words
Apparatus for investigating the properties of a surface as claimed in either Claim 1 or Claim 2 further including lateral scanning means to move the beam of radiation relative to the surface in a direction transverse to the optical axis of the beam.
Claim 5
Dependent Claim
19 words
Apparatus as claimed in Claim 3 wherein said detection means is positioned to receive radiation reflected by said surface.
Claim 6
Dependent Claim
19 words
Apparatus as claimed in Claim 3 wherein said detection means is positioned to receive radiation transmitted by said surface.
Claim 7
Dependent Claim
25 words
Apparatus as claimed in either claim 4 or Claim 5 wherein said means for generating a collimated beam of radiation comprises a laser light source.
Claim 8
Dependent Claim
24 words
Apparatus as claimed in Claim 6 wherein said laser light source incorporates Zeeman splitting means to generate separate components of radiation having different frequencies.
Claim 9
Dependent Claim
13 words
A scanning microscope incorporating apparatus claimed in any one of the preceding claims.
Claim 10
Independent Claim
85 words
A method of investigating a surface comprising illuminating the surface with a beam of radiation having components of equal amplitude in two orthogonal directions of polarisation, the components being focused at different positions along the optical axis of the device, causing relative motion in the axial direction of the surface and the foci between the positions of the foci and receiving radiation from the surface and from a comparision of the components at said two orthogonal directions of polarisation, deriving information related to the surface.
Claim 11
Independent Claim
85 words
A method of investigating a surface comprising illuminating the surface with a beam of radiation having components of equal amplitude in two orthogonal directions of polarisation, the components being focused at different positions along the optical axis of the device, causing relative motion in the axial direction of the surface and the foci between the positions of the foci and receiving radiation from the surface and from a comparision of the components at said two orthogonal directions of polarisation, deriving information related to the surface.
References Cited (Backward Citations)
DE2112229B2
Cited
EP0021148A1
Cited
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