EP0093831A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Neutralised low energy ion beam generator, method of producing a neutralised low energy ion beam and method of producing a neutralised high energy ion beam
Assignee: Kaufman Harold Richard
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Filing: 1983-01-26
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Granted: —
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Expires: 2003-01-26
Abstract
Abstract A neutralised low energy ion beam is produced by forming a plasma between an anode (13) and a cathode (14) and maintaining a grid (16) at a potential slightly more positive than the cathode (14) so that a beam containing positive ions and high energy primary electrons from the plasma passes through the grid (16). A neutralised high energy ion beam is produced by directing (Fig. 4) a low energy beam containing charged particles of opposite polarity to that of the ions in an unneu- trallsed high energy ion beam across the latter beam. The low energy beam may be one produced by a generator Fig.1) as described above or another ion source and an electron source (21).
Inventors
- 👤 James Mckell Edwin Harper
- 👤 Mordehai Heiblum
- 👤 Harold Richard Kaufman
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 02:58
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J27/08; H01J37/00; H01J37/02; H01J37/026
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
84 words
A method of producing a neutralised low energy ion beam comprising passing an electrical current between an anode and a cathode in a gas filled chamber to produce a plasma containing positive ions, high energy primary electrons and low energy background electrons, the method being characterised by establishing such a potential on a grid disposed to one side of the plasma that positive ions and high energy primary electrons from the plasma flow through the grid thereby producing a neutralised low energy ion beam.
Claim 2
Independent Claim
84 words
A method of producing a neutralised low energy ion beam comprising passing an electrical current between an anode and a cathode in a gas filled chamber to produce a plasma containing positive ions, high energy primary electrons and low energy background electrons, the method being characterised by establishing such a potential on a grid disposed to one side of the plasma that positive ions and high energy primary electrons from the plasma flow through the grid thereby producing a neutralised low energy ion beam.
Claim 3
Dependent Claim
28 words
A method as claimed in claim 1, in which the grid is maintained at a potential of from 1 to 5 volts positive with respect to the cathode.
Claim 4
Dependent Claim
117 words
A neutralised low energy ion beam generator comprising a chamber (11) containing an anode (13) and a cathode (14), means to introduce an ionisable gas into the chamber, and means to provide a potential difference between the cathode and the anode to form a plasma; the generator being characterised by one wall of the chamber being in the form of a grid (16) disposed to one side of a direct path between the anode (13) and the cathode (14) and means to maintain the grid at a potential slightly more positive than the cathode whereby ions and high energy primary electrons from the plasma flow through the grid to thereby produce a neutralised low energy ion beam.
Claim 5
Dependent Claim
117 words
A neutralised low energy ion beam generator comprising a chamber (11) containing an anode (13) and a cathode (14), means to introduce an ionisable gas into the chamber, and means to provide a potential difference between the cathode and the anode to form a plasma; the generator being characterised by one wall of the chamber being in the form of a grid (16) disposed to one side of a direct path between the anode (13) and the cathode (14) and means to maintain the grid at a potential slightly more positive than the cathode whereby ions and high energy primary electrons from the plasma flow through the grid to thereby produce a neutralised low energy ion beam.
Claim 6
Dependent Claim
35 words
A neutralised low energy ion beam generator as claimed in claim 3, in which the cathode is disposed at such a position in the chamber to minimize contamination of the neutralised low energy ion beam.
Claim 7
Independent Claim
41 words
A method of producing a neutralised high energy ion beam characterised by directing across an unneutralised high energy ion beam, a relatively low energy beam containing charged particles of opposite polarity to that of the ions in the unneutralised ion beam.
Claim 8
Independent Claim
41 words
A method of producing a neutralised high energy ion beam characterised by directing across an unneutralised high energy ion beam, a relatively low energy beam containing charged particles of opposite polarity to that of the ions in the unneutralised ion beam.
Claim 9
Dependent Claim
29 words
A method as claimed in claim 5, in which the ions in the unneutralised high energy beam are of negative polarity and the low energy beam contains positive ions.
Claim 10
Dependent Claim
29 words
A method as claimed in claim 5, in which the ions in the unneutralised high energy beam are of positive polarity and the low energy beam contains free electrons.
Claim 11
Independent Claim
22 words
A method as claimed in any of claims 5 to 7, in which the low energy beam is generated from a plasma.
Claim 12
Dependent Claim
38 words
A method as claimed in claim 8, in which the low energy beam is produced by a method as claimed in claim 1 or claim 2 or by a generator as claimed in claim 3 or claim 4.
References Cited (Backward Citations)
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