EP0093191A1
Expired / Lapsed
EP
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Pressure control
Assignee: Balzers und Leybold Deutschland Holding AG
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Filing: 1982-05-21
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Granted: —
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Expires: 2002-05-21
Abstract
Abstract The pressure control is designed to be arranged between a recipient and a vacuum pump and to maintain a constant pressure inside the recipient. A diaphragm (7) is accommodated in the pressure control housing (1); one side of the diaphragm is a reference pressure chamber (8); on the other side of the diaphragm are a first chamber (23), which is connected to the union (4) leading to the receptacle, and a second chamber (21) which is connected to the union (3) leading to the pump; the diaphragm (7) serves as control element for connecting or separating the two chambers (21, 23). <IMAGE>
Inventors
- 👤 Gerd Dr. Koopmann
- 👤 Hans Limp
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 22:49
CPC Classifications
G; G05; G05D; G05D16/00; G05D16/04; G05D16/06; G05D16/063; G05D16/0638; G05D16/0641
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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