Patent US1772804A successfully refreshed from Google Patents.
EP0092444A2
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EP
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Positive type photosensitive resin composition
Assignee: JSR Corp
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Filing: 1983-04-20
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Granted: —
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Expires: 2003-04-20
Abstract
Abstract A positive type photosensitive resin composition comprising an alkali-soluble novolac resin and (A) a compound of formula (I) and a compound of formula (II) or (B) a compound of formula (III) and a compound of formula (IV), the molar ratio of compound (I) to compound (II) being from 6:4 to 9:1, the molar ratio of compound (III) to compound (IV) being from 1:9 to 9:1 and the total amount of component (A) or (B) being from 5 to 100 parts by weight per 100 parts by weight of the alkali-soluble novolac resin: wherein R 1 , R 5 , R 8 and R 10 , which may be the same or different, represent alkyl, aryl or aralkyl groups; and R 2 , R 3 , R 4 , R 6 , R 7 , R 9 , R 11 and R 12 , which may be the same or different, represent 1,2-naphthoquinonediazide-4-sulfonyl, 1,2-naphthoquinonediazide-5-sulfonyl or 1,2-benzoquinonediazide-4-sulfonyl groups. This positive type photosensitive resin composition has excellent sensitivity and yield of residual film thickness.
Inventors
- 👤 Yoshihiro Hosaka
- 👤 Yoichi Kamoshida
- 👤 Yoshiyuki Harita
- 👤 Kunihiro Harada
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-02 13:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
265 words
A photosensitive resin composition comprising an alkali-soluble novolac resin, characterized in that it additionally contains (A) a compound of formula (I): (wherein R 1 represents an alkyl group, an aryl group or an aralkyl group, and R 2 , R 3 and R 4 , which may be the same or different, each represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group) and a compound of formula (II): (wherein R 5 represents an alkyl group, an aryl group or an aralkyl group, and R 6 and R 7 , which may be the same or different, each represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4- sulfonyl group); or (B) a compound of formula (III): (wherein R 8 represents an alkyl group, an aryl group or an aralkyl group and R 9 represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a l,2-naphthoquinonediazide-5- sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group) and a compound of formula (IV): (wherein R 10 represents an alkyl group, an aryl group or an aralkyl group, and R 11 and R 12 , which may be the same or different, each represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group), the proportion of component (A) or (B) being from 5 to 100 parts by weight per 100 parts by weight of the alkali-soluble novolac resin, the molar ratio of the compound of formula (I) to the compound of formula (II) in component (A) being from 6:4 to 9:1 and the molar ratio of the compound of formula (III) to the compound of formula (IV) in component (B) being from 1:9 to 9:1
Claim 2
Dependent Claim
265 words
A photosensitive resin composition comprising an alkali-soluble novolac resin, characterized in that it additionally contains (A) a compound of formula (I): (wherein R 1 represents an alkyl group, an aryl group or an aralkyl group, and R 2 , R 3 and R 4 , which may be the same or different, each represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group) and a compound of formula (II): (wherein R 5 represents an alkyl group, an aryl group or an aralkyl group, and R 6 and R 7 , which may be the same or different, each represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4- sulfonyl group); or (B) a compound of formula (III): (wherein R 8 represents an alkyl group, an aryl group or an aralkyl group and R 9 represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a l,2-naphthoquinonediazide-5- sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group) and a compound of formula (IV): (wherein R 10 represents an alkyl group, an aryl group or an aralkyl group, and R 11 and R 12 , which may be the same or different, each represents a 1,2-naphthoquinonediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group), the proportion of component (A) or (B) being from 5 to 100 parts by weight per 100 parts by weight of the alkali-soluble novolac resin, the molar ratio of the compound of formula (I) to the compound of formula (II) in component (A) being from 6:4 to 9:1 and the molar ratio of the compound of formula (III) to the compound of formula (IV) in component (B) being from 1:9 to 9:1
Claim 3
Dependent Claim
104 words
A composition according to Claim 1, wherein R 1 , R 5 , R 8 and R 10 in formulae (I), (II), (III) and (IV) represent alkyl groups having from 1 to 12 carbon atoms, aryl groups represented by the formula (in which R a and R b , which may be the same or different, each represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms) or aralkyl groups represented by the formula (in which R c represents a hydrogen atom or an alkyl group having from 1 to 4 carbon atoms and n is 1 or 2).
Claim 4
Dependent Claim
36 words
A composition according to Claim 1 or Claim 2, wherein the molar ratio of the compound of formula (I) to the compound of formula ( II ) is from 6.5 : 3.5 to 8.5 : 1.5
Claim 5
Dependent Claim
34 words
A composition according to Claim 1, or Claim 2, wherein the molar ratio of the compound of formula (III) to the compound of formula (IV) is from 2 : 8 to 7 : 3.
Claim 6
Dependent Claim
36 words
A composition according to any one of the preceding Claims, wherein the amount of component (A) or (B) is from 10 to 50 parts by weight per 100 parts by weight of said alkali-soluble novolac resin.
Claim 7
Dependent Claim
36 words
A composition according to any one of the preceding Claims which additionally contains another 1,2-quinonediazide compound in an amount not greater than 20 parts by weight per 100 parts by weight of said alkali-soluble novolac resin.
Claim 8
Dependent Claim
109 words
A composition according to Claim 6, wherein, when component (A) is employed, said other 1,2-quinonediazide compound is at least one compound of formula ( I II) or (IV) (as defined in Claim 1) or (VII): (wherein R 15 represents an alkyl group, an aryl group or an aralkyl group and R 16 represents a 1,2-naphtho- quinoediazide-4-sulfonyl group, a 1,2-naphthoquinonediazide-5-sulfonyl group or a 1,2-benzoquinonediazide-4-sulfonyl group) or compound (VIII) prepared by condensing 1,2-naphthoquinonediazide-5-sulfonyl chloride with an alkali-soluble novolac resin, or wherein, when component (B) is employed, said other 1,2-quinonediazide compound is at least one compound of formula (I) or (II) (as defined in Claim 1) or (VII) or a compound (VIII).
Claim 9
Dependent Claim
48 words
A composition according to any one of the preceding Claims, wherein said alkali-soluble novolac resin is that produced by the addition-condensation reaction of a phenol and an aldehyde in a molar ratio of from 1 : 0.7 to 1 : 1 in the presence of an acid catalyst.
Claim 10
Dependent Claim
47 words
A composition according to any one of the preceding Claims, wherein R 2 , R 3 and R 4 in formula (I), R 6 and R 7 in formula (II), R 9 in formula (III) and R 11 and R 12 in formula (IV) represent 1,2-naphthoquinonediazide-5-sulfonyl groups.
Claim 11
Dependent Claim
35 words
10 A composition according to Claim 9, wherein R 1 in formula (I), R 5 in formula (II), R 8 in formula (III) and R 10 in formula (IV) represent phenyl, methyl or hexyl groups.
References Cited (Backward Citations)
No citation records indexed.
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