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EP0089559A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Method for forming metal coatings for metallurgy patterns on dielectric substrates

Assignee: International Business Machines Corp
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Filing: 1983-03-10
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Granted: —
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Expires: 2003-03-10
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Abstract

Abstract The method comprises a maskless technique for plating a protective metal layer (5) on an existing metallurgical pattern (2, 4) supported on a dielectric substrate (1) by blanket coating said metal layer (5) over said substrate (1) and said pattern (2, 4), heating to diffuse the metal of said layer (5) into said pattern (2, 4) and cooling to spall the metal layer (5) on the non-patterned portion of the substrate surface, and mechanically removing the metal layer (5) from the non-patterned substrate surfaces. Optionally, the metal layer (5) can also be blanket coated with a passivating metal film (10) with interdiffusion therebetween at the interface during the noted heating step. <??>The method is useful for forming protected metal coatings on refractive metal conductive patterns on ceramic substrate carriers employed for mounting semiconductor devices thereon.

Inventors

  • 👤 Ananda Hosakere Kumar

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-11-03 21:03
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/66; H05; H05K; H05K3/00; H05K3/22; H05K3/24; H05K3/245; H05K3/246; H10W70/01; H10W70/05; H05K2203/00; H05K2203/11; H05K2203/1105; H05K3/02; H05K3/04; H05K3/10; H05K3/14; H05K3/143; H05K3/244

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 93 words
Method for selectively coating an existing metallurgical pattern supported on a dielectric substrate with a diverse metal layer characterized by the following steps: blanket depositing said metal layer (5) on said substrate (1) and said metallurgical pattern (2, 4) ; heating the then present structure; diffusion bonding said metal layer (5) to said metallurgical pattern (2, 4); cooling said structure to spall said metal layer (5) on the surface of said substrate (1) due to differences in the expansion and contraction differentials therebetween; and mechanically removing said metal layer (5) from said surface.
Claim 2
Dependent Claim 93 words
Method for selectively coating an existing metallurgical pattern supported on a dielectric substrate with a diverse metal layer characterized by the following steps: blanket depositing said metal layer (5) on said substrate (1) and said metallurgical pattern (2, 4) ; heating the then present structure; diffusion bonding said metal layer (5) to said metallurgical pattern (2, 4); cooling said structure to spall said metal layer (5) on the surface of said substrate (1) due to differences in the expansion and contraction differentials therebetween; and mechanically removing said metal layer (5) from said surface.
Claim 3
Dependent Claim 18 words
Method according to claim 1, wherein said metal layer (5) is made of conductive solderable or brazable metal.
Claim 4
Dependent Claim 49 words
Method according to claim 1 or 2, wherein layer (5) is made of a metal which is not wetable to said substrate (1) but mechanically adhesive to said substrate (1) and said metallurgical pattern (2, 4) and which has a higher coefficient of thermal expansion than said substrate (1).
Claim 5
Dependent Claim 25 words
Method according to any one of claims 1 to 3, wherein said substrate (1) is formed of a ceramic material material, like an alumina ceramic.
Claim 6
Dependent Claim 24 words
Method according to any one of claims 1 to 4, wherein said metallurgical pattern (2, 4) is comprised of a refractory metal, like molybdenum.
Claim 7
Dependent Claim 21 words
Method according to any one of claims 1 to 5, wherein said layer (5) is made of a metal, like nickel.
Claim 8
Dependent Claim 21 words
Method according to any one of claims 1 to 6, wherein said metal layer (5) is removed from said substrate ultrasonically.
Claim 9
Dependent Claim 51 words
Method according to any one of claims 1 to 7, wherein a conductive passivating diverse second metal layer (10) is deposited over the first said metal layer (5) prior to said heating step and wherein both said metal layers (5, 10) are interdiffused at the interface therebetween during said heating step.
Claim 10
Dependent Claim 15 words
Method according to claim 8, wherein the said second layer (10) is made of gold.

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