EP0087842A2
Expired / Lapsed
EP
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Infra-red radiation detectors and their manufacture
Assignee: BAE Systems Electronics Ltd
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Filing: 1983-02-23
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Granted: —
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Expires: 2003-02-23
Abstract
Abstract A multi-colour or other multi-level infra-red detector comprises at least one first detector element (10) formed in a first portion (11) of a lower body (11,12,13), e.g. of cadmium mercury telluride, and at least one second detector element (20) having different detector characteristics formed in an upper body (21) e.g. of cadmium mercury telluride. The lower body is divided preferably by ion-milling into at least two (and more usually three or more) portions (11,12 and 13) separated from each other by gaps (14,15) which are bridged by the upper body (21). Electrical connections to the second detector element(s) comprise the separate second (and further) portions (12 and 13) of the lower body and preferably include metallization layers (2 and 3) extending from the top to the substrate (1) on which the lower body (11, 12, 13) is mounted. The substrate (1) may be of insulating material, e.g. sapphire, or it may be for example a silicon CCD for processing signals from the detector elements (10 and 20).
Inventors
- 👤 John Barry C/O Mullard Southampton Readhead
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-07 19:20
CPC Classifications
H; H10; H10F; H10F30/00; H10F30/20; H10F30/21; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/157; H10F39/1575; H10W; H10W90/00; H10W90/20; H10W90/22
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
174 words
An infra-red radiation detector comprising at least one first detector element which is formed in a lower body of infra-red sensitive material mounted on a substrate, at least one second detector element which has different detector characteristics from those of the first detector element and which is formed in an upper body of infra-red sensitive material mounted on said lower body, and electrical connections to the detector elements of the upper and lower bodies, one of the first and second detector elements being positioned to receive infra-red radiation transmitted by the other of said detector elements, characterized in that the lower body is divided into at least two portions separated from each other by a gap, in that the upper body bridges the gap between said two portions of the lower body, in that the first detector element is formed in a first of said two portions of the lower body, and in that the second detector element has an electrical connection which comprises the second of said two portions of the lower body.
Claim 2
Dependent Claim
174 words
An infra-red radiation detector comprising at least one first detector element which is formed in a lower body of infra-red sensitive material mounted on a substrate, at least one second detector element which has different detector characteristics from those of the first detector element and which is formed in an upper body of infra-red sensitive material mounted on said lower body, and electrical connections to the detector elements of the upper and lower bodies, one of the first and second detector elements being positioned to receive infra-red radiation transmitted by the other of said detector elements, characterized in that the lower body is divided into at least two portions separated from each other by a gap, in that the upper body bridges the gap between said two portions of the lower body, in that the first detector element is formed in a first of said two portions of the lower body, and in that the second detector element has an electrical connection which comprises the second of said two portions of the lower body.
Claim 3
Dependent Claim
96 words
A detector as claimed in Claim 1, further characterized in that the second of said two portions of the lower body has metallization which is associated with the second detector element and which extends on a top face of the second portion, over a side face and onto the substrate, and in that the second detector element has a metallization connection from the upper body to the metallization at the top face of the second of said two portions of the lower body to form an electrical connection from the second detector element to the substrate.
Claim 4
Dependent Claim
55 words
A detector as claimed in Claim 1 or Claim 2, further characterized in that the lower body also comprises a third portion which is separated from the first portion by another gap bridged by the upper body, and the second detector element has another electrical connection which comprises said third portion of the lower body.
Claim 5
Dependent Claim
93 words
A detector as claimed in Claim 3, further characterized in that said third portion of the lower body has metallization which forms part of another electrical connection to the second detector element and which extends on a top face of the third portion, over a side face and onto the substrate, and the second detector element has a metallization connection from the upper body to the metallization at the top face of the third portion of the lower body to form said other electrical connection from the second detector element to the substrate.
Claim 6
Dependent Claim
39 words
A detector as claimed in any of the preceding Claims, further characterized in that an array of second detector elements is formed in the upper body and overlies an array of first detector elements formed in the lower body.
Claim 7
Dependent Claim
61 words
A detector as claimed in Claim 5 when appendant either to Claim 3 or Claim 4, further characterized in that the lower body comprises a plurality of mutually separate second portions for individual electrical connections to the second detector elements of the upper array, and a common third portion for providing a common connection to the array of second detector elements.
Claim 8
Dependent Claim
53 words
A detector as claimed in Claim 6, further characterized in that the plurality of mutually separate second portions are arranged along one side of the array of the first detector elements of the lower body, and the common third portion is located at a transverse side of the array of first detector elements.
Claim 9
Dependent Claim
33 words
A detector as claimed in any of Claims 5 to 7, further characterized in that the lower body comprises an array of said first portions each of which comprises a first detector element.
Claim 10
Dependent Claim
43 words
A detector as claimed in any of the preceding Claims, further characterized in that the infra-red sensitive material of the lower body has a higher cut-off wavelength than that of the upper body and senses long wavelength radiation transmitted by the upper body.
Claim 11
Dependent Claim
24 words
A detector as claimed in any of the preceding Claims, further characterized in that the upper and lower bodies are of cadmium mercury telluride.
Claim 12
Independent Claim
104 words
A method of manufacturing an infra-red radiation detector claimed in any of the preceding Claims, characterized in that an undivided lower body of infra-red sensitive material is mounted on the substrate, a metallization pattern is provided on the lower body and on the substrate beyond said body, and said lower body is divided into its separate portions by ion-etching through the thickness of the body to form the gap or gaps in the lower body, after which the upper body is mounted on the divided lower body and is provided with metallization to form the electrical connections to the second detector element or elements.
Claim 13
Dependent Claim
38 words
A method as claimed in Claim 11, further characterized in that the ion-etching also serves to divide the metallization pattern provided on the lower body and substrate into separate metallization for the separate portions of the lower body.
References Cited (Backward Citations)
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