EP0087196A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Charged particle beam exposure device incorporating beam splitting
Assignee: Koninklijke Philips NV
•
Filing: 1983-02-14
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Granted: —
•
Expires: 2003-02-14
Abstract
Abstract An electron source or ion source of a charged-particie beam exposure device comprises a matrix of elements, each of which forms an elementary beam. The matrix is arranged in a field space such that the elementary beams emerge from the matrix in a mutually diverging manner. At the area where the distance between the elementary beams is sufficiently large, there is arranged an electrode system (8) with a matrix of beam deflectors (22) in which each of the elementary beams can be independently manipulated. Near a target (14) to be exposed there is arranged an aperture plate (44) which completely or partly transmits each of the modulated elementary beams so that spot-shaping can be performed. Using the device in accordance with the invention; for example, some hundred, possibly different patterns can be written simultaneously.
Inventors
- 👤 Jan Bart Le Poole
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 17:35
CPC Classifications
B; B82; B82Y; B82Y10/00; H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J37/3177; B82Y40/00; H01J37/3002; H01J37/3007
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
82 words
A device for exposing a target (14) to be positioned in an object space to a beam of charged particles, said device comprising a radiation source (4) and a beam modulation system with a beam splitting device (10) which is situated near the object space, characterized in that the device comprises a further beam splitting device (6) which is arranged near the radiation source, an electrode system (8) which comprises a multiple beam reflector being included between the two beam splitting devices.
Claim 2
Independent Claim
82 words
A device for exposing a target (14) to be positioned in an object space to a beam of charged particles, said device comprising a radiation source (4) and a beam modulation system with a beam splitting device (10) which is situated near the object space, characterized in that the device comprises a further beam splitting device (6) which is arranged near the radiation source, an electrode system (8) which comprises a multiple beam reflector being included between the two beam splitting devices.
Claim 3
Dependent Claim
46 words
A device as claimed in Claim 1, characterized in that the source-side beam splitting device (6) comprises a gauze structure on either side of which there is arranged an electron array (20, 22) in order to homogenize an electric field to be generated near the gauze.
Claim 4
Dependent Claim
45 words
A device as claimed in Claim 1 or 2, characterized in that the source-side beam splitting device comprises two systems ( 1 8) of parallel wires which are directed transversely to one another, it being possible to apply mutually different potentials to the wires thereof.
Claim 5
Dependent Claim
62 words
A device as claimed in Claim 1, 2 or 3, characterized in that the beam modulation system is arranged at such a distance from the source-side beam splitting device that elementary beams are situated at such a distance from one another at this area that the beam modulation system may comprise an individually, independently controllable beam deflector (26) for each elementary beam.
Claim 6
Independent Claim
42 words
A device as claimed in any of the preceding Claims, characterized in that the lens system of the multiple beam deflector is adapted to direct the elementary beams perpendicularly to the deflector and to converge these beams again behind the beam deflector.
Claim 7
Independent Claim
50 words
A device as claimed in any of the preceding Claims, characterized in that between the object-side beam splitting device and an image-side aperture plate (44) there is arranged an aperture plate which transmits the elementary beams and whereto an electric field can be applied by means of neighbouring, ring-shaped electrodes.
Claim 8
Independent Claim
51 words
A device as claimed in any of the preceding Claims, characterized in that on either side of the multiple beam deflector there is arranged a gauze structure (32 and 34) which transmits elementary beams and whereto an electric field can be applied by means of neighbouring, ring-shaped electrodes (40 and 42).
Claim 9
Independent Claim
53 words
A device as claimed in any of the preceding Claims, characterized in that the deflection elements for the x-direction and the beam deflection elements for the y-direction are mounted in the beam deflector in planes which are situated at a distance from one another and which are directed transversely of the optical axis.
Claim 10
Independent Claim
60 words
A device as claimed in any of the preceding Claims, characterized in that the deflector is composed of an electrically insulating carrier plate on either side of which there are provided deflection electrodes in the form of metal layer portions whereto the desired control potentials can be applied by electrically conductive tracks which are also provided on the carrier plate.
Claim 11
Independent Claim
30 words
A device as claimed in any of the preceding Claims, characterized in that the source comprises a matrix of emissive elements which also acts as the object-side beam splitting device.
Claim 12
Dependent Claim
23 words
11 . A device as claimed in Claim 8, characterized in that the beam deflector comprises a matrix of controllable mirror electrodes (50).
Claim 13
Independent Claim
29 words
A device as claimed in any of the preceding Claims, characterized in that it comprises controllable optical means for charged particles in order to perform spot-shaping per elementary beam.
Claim 14
Independent Claim
43 words
A device as claimed in any of the preceding Claims, characterized in that it is constructed as an electron-lithographic apparatus for forming patterns which define microcircuits by means of a read apparatur (60) for the reading of drawings of patterns to be formed.
Claim 15
Independent Claim
32 words
A device as claimed in any of the Claims 1 to 12 , characterized in that it is constructed as an ion lithographic apparatus for the writing of patterns in a target.
Claim 16
Dependent Claim
43 words
A device as claimed in Claim 14, characterized in that the modulation system is preceded by means for decelerating an ion beam and is followed by means for accelerating the ion beam again, without the mutual relationship of the elementary beams being disturbed.
Claim 17
Dependent Claim
33 words
1 6. A device as claimed in any of the preceding Claims, characterized in that the beam splitting device has a hexagonal configuration, the cross-sections of the elementary beams being hexagonal or circular.
References Cited (Backward Citations)
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