EP0077535A1
Expired / Lapsed
EP
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Method for the production of layers of high melting metals at low substrate temperatures
Assignee: Siemens AG
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Filing: 1982-10-14
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Granted: —
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Expires: 2002-10-14
Abstract
Abstract 1. A method for the production of layers, consisting of tantalum, tungsten or molybdenum on substrates at low temperatures, wherein the halides of these metals are used as starting materials, which in the presence of silane (SiH4 ) are thermally decomposed and reduced from the gas phase at temperatures <500 C and in the pressure range of 25 Pa to 11x10**3 Pa.
Inventors
- 👤 Claudia Ing. Grad. Wieczorek
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 06:14
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/06; C23C16/08; H; H10; H10P; H10P14/00; H10P14/40; H10P14/412; H10P14/42; H10P14/43
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References Cited (Backward Citations)
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