EP0069253A1
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Thermal flow rate sensor
Assignee: Hitachi Ltd
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Filing: 1982-06-15
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Granted: —
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Expires: 2002-06-15
Abstract
Abstract A flow rate sensor (10) having a plate-like substrate (1) of an insulating material, a layer of a temperature-varying resistance film formed on the upstream side surface of the substrate (1) as viewed in the direction of flow of the fluid and terminals (4) connected to both ends of the resistance film layer. The substrate is inclined to a plane perpendicular to the direction (F) of flow of the fluid.
Inventors
- 👤 Sadayasu Ueno
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-08 22:06
CPC Classifications
G; G01; G01F; G01F1/00; G01F1/68; G01F1/684; G01F1/688; G01F1/69; G01F1/692
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
76 words
In a thermal flow rate sensor comprising a substrate of an insulating material, a temperature-varying resistance layer formed on said substrate and terminals connected to both ends of the resistance film layer, the improvement compris said resistance film layer being formed on the upstream side surface of said substrate as viewed in the direction of fluid and said substrate being mounted at an inclination to a plane perpendicular to the direction of flow of said fluid.
Claim 2
Dependent Claim
76 words
In a thermal flow rate sensor comprising a substrate of an insulating material, a temperature-varying resistance layer formed on said substrate and terminals connected to both ends of the resistance film layer, the improvement compris said resistance film layer being formed on the upstream side surface of said substrate as viewed in the direction of fluid and said substrate being mounted at an inclination to a plane perpendicular to the direction of flow of said fluid.
Claim 3
Dependent Claim
26 words
A thermal flow rate sensor according to claim 1 wherein said substrate is inclined to said plane at an inclination angle ranging between 30 and 60°.
Claim 4
Dependent Claim
38 words
A thermal flow rate sensor according to either one of claims 1 and 2 wherein the upstream side edge of said substrate is chamfered so as to be in parallel with the direction of flow of said fluid.
References Cited (Backward Citations)
US4024761A
Cited
GB2034482A
Cited
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