EP0065352A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Light-sensitive polymer composition
Assignee: Hitachi Ltd
•
Filing: 1982-04-13
•
Granted: —
•
Expires: 2002-04-13
Abstract
Abstract A light-sensitive polymer composition comprising (a) a poly(amic acid), (b) a bisazide, (c) an amine and, if necessary, (d) a photosensitizer can give a coating film having excellent sensitivity and degree of resolution, which film can be used as an insulating film for example in multilayer semiconductors or heat resistant resists.
Inventors
- 👤 Fumio Kataoka
- 👤 Fusaji Shoji
- 👤 Isao Obara
- 👤 Issei Takemoto
- 👤 Hitoshi Yokono
- 👤 Tokio Isogai
- 👤 Mitsumasa Kojima
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-31 11:20
CPC Classifications
C; C08; C08L; C08L79/00; C08L79/04; C08L79/08; G; G03; G03F; G03F7/00; G03F7/004; G03F7/008; G03F7/012; G03F7/0125; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/12; Y10S430/128
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
88 words
A light-sensitive polymer composition comprising (a) 100 parts by weight of a poly(amic acid), (b) 0.1 to 100 parts by weight of a bisazide, (c) 1 to 400 parts by weight of at least one amine selected from the group consisting of an amine containing a group having a tertiary carbon atom and hydrogen bonded thereto in its molecule, an amine containing a group having a secondary carbon atom and hydrogen bonded thereto in its molecule, and an amine containing at least one unsaturated bond in its molecule.
Claim 2
Dependent Claim
88 words
A light-sensitive polymer composition comprising (a) 100 parts by weight of a poly(amic acid), (b) 0.1 to 100 parts by weight of a bisazide, (c) 1 to 400 parts by weight of at least one amine selected from the group consisting of an amine containing a group having a tertiary carbon atom and hydrogen bonded thereto in its molecule, an amine containing a group having a secondary carbon atom and hydrogen bonded thereto in its molecule, and an amine containing at least one unsaturated bond in its molecule.
Claim 3
Dependent Claim
12 words
A composition according to Claim 1, which further comprises (d) a photosensitizer.
Claim 4
Dependent Claim
153 words
A composition according to Claim 1 or 2, wherein the bisazide (b) is at least one member selected from the group consisting of: wherein X is -N 3 or -SO 2 N 3 ; R 4 is hydrogen, a lower alkyl group, -OH, -OCH 3 , -COOH, -SO 3 H, -NO 2 or a halogen and each R 4 may be the same or different; R 5 , R 6 and R 7 are independently an alkylene group, -S0 2 -, -S-, -0-, -O-(CH 2 ) k -O- or R 8 is -OH, - OR 9 , . -COOH, or -COOR 9 ; Y is -0-, -S-, or -NH-; ℓ is an integer of 1 to 5; m is zero or 1; Z is -OH, -OR 9 , -R 10 -OH, -COOH, -COOR 9 , or - NH2 ; R 9 is a lower alkyl group; and R 10 is an alkylene group.
Claim 5
Dependent Claim
134 words
A composition according to Claim 1, 2 or 3, wherein the amine (c) is at least one member selected from the group consisting of: wherein R 11 , R 12 , R 13 and R 15 are independently hydrogen, a lower alkyl group, a phenyl group, or a vinyl group; R14 is an alkylene group; R 16 is a lower alkyl group, a phenyl group or a vinyl group; i is an integer of 1 to 3, j is zero or an integer of 1 or 2 and i + j = 3; R 17 , R 18 and R 19 are independently hydrogen, a lower alkyl group, a phenyl group or a vinyl group; R 20 is hydrogen, a lower alkyl group or a vinyl group; and R 21 is an alkylene group.
Claim 6
Dependent Claim
79 words
5 . A composition according to any one of the preceding: claims wherein the poly(amic acid) (a) is one having as a major component a repeating unit of the formula : wherein R 1 is a trivalent or tetravalent organic group having at least 2 carbon atoms; R 2 is a divalent organic group having at least 2 carbon atoms; M is hydrogen, an alkali metal or an ammonium ion; and n is an integer of 1 or 2.
Claim 7
Dependent Claim
57 words
A composition according to any one of the preceding claims wherein the bisazide (b) is or one represented by the formula: wherein Z is -OH, -OR 9 , -R 10 -OH, -COOH, -COOR 9 , or -NH 2 ; R 9 is a lower alkyl group; R 10 is an-alkylene group; and m is zero or 1.
Claim 8
Dependent Claim
62 words
A composition according to any one of the preceding claims wherein the amine (c) is one represented by the formula: wherein R 17 , R 18 and R 19 are independently hydrogen, a lower alkyl group, a phenyl group or a vinyl group; R 20 is hydrogen, a lower alkyl group or a vinyl group; and R 21 is an alkylene group.
Claim 9
Dependent Claim
106 words
A composition according to any one of the preceding claims wherein the poly(amic acid) is one having as a major component a repeating unit of the formula: wherein R 2 is an aromatic ring-containing group, a silicon-containing group or a heterocyclic ring-containing group of the formula: or Ar 1 is one member selected from the group consisting of - and each Ar 2 -independently is selected from the group consisting of wherein the three bonding lines are bonded to the three carbonyl groups of the polymer main chain and the remainder one is bonded to a COOM group wherein M is as defined in claim 5.
Claim 10
Dependent Claim
37 words
A composition according to any one of the preceding claims wherein the bisazide (b) is at least one member selected from the group consisting of 2,6-di(4'-azidebenzal)-4-methylcyclohexanone, 4,4-diazidechalcone, 2,6-di(4'-azidebenzal)-4-hydroxycyclohexane, 2,6-di(4'-azidebenzal)-4-methoxycyclohexanone, 2,6-di(4'-azidebenzal)-4-methylolcyclohexanone, 2,6-di(4'-azidebenzal)-4-trimethylsilylcyclo- hexanone, α d -cyano-4,4'-diazidestilbene, and 2,6-di(4'-azidecinnamylidene)-4-hydroxycyclohexanone.
Claim 11
Dependent Claim
21 words
A composition according to anyone of the preceding claims wherein the amine (c) is 3-(N,N-dimethylamino)propyl methacrylate, 4-(N,N-dimethylamino)butyl methacrylate or 3-(N,N-dimethylamino)propyl cinnamate.
Claim 12
Dependent Claim
28 words
A composition according to Claim 10, wherein the amine (c) is 4-(N,N-dimethylamino)butyl methacrylate or 3-(N,N-dimethylamino)propyl methacrylate and the bisazide (b) is 2,6-di(4'-azidebenzal)-4-methylolcyclohexanone, 2,6-di(4'-azidebenzal)-4-methoxycyclohexanone, or α d - cyano-4,4'-diazidestilbene.
Claim 13
Dependent Claim
28 words
A process for forming a relief pattern on a substrate which comprises applying a composition as claimed in any one of claims 1 to 11 to the substrate.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.