EP0064352A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A beam-machine method and apparatus and a product made thereby
Assignee: Japan Kinoko Research Center Foundation
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Filing: 1982-04-20
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Granted: —
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Expires: 2002-04-20
Abstract
Abstract A method of and apparatus for machining a workpiece (2), such as ceramic, with an energy beam (B), e.g. a beam of energetic ions or laser beam, produced by a beam generator (1). A carriage (3), having the workpiece securely mounted thereon, and the beam generator are relatively displaced to cause the beam to move in a scanning manner along a prescribed path on the workpiece surface. An acoustic emission from the workpiece being machined is sensed by a transducer (7) disposed in contact therewith to provide a control signal which is applied to the generator for controlling the energy or energy density of the beam and ! or to a drive unit for displacing the workpiece relative to the beam generator to control the rate of relative scanning displacement between the energy beam and the workpiece.
Inventors
- 👤 Kiyoshi Inoue
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-23 12:33
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/04; B23K15/00; B23K26/03
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
89 words
1 . A method of machining a workpiece with an energy beam, comprising the steps of: relatively displacing the energy beam and the workpiece to cause the beam to move along a prescribed path on the workpiece surface, thereby machining the workpiece; sensing an acoustic emission from the workpiece being machined to provide a control signal; and in response to the control signal, controlling at least one of the energy and the energy density of the beam and the rate of relative displacement between the beam and the workpiece.
Claim 2
Dependent Claim
89 words
1 . A method of machining a workpiece with an energy beam, comprising the steps of: relatively displacing the energy beam and the workpiece to cause the beam to move along a prescribed path on the workpiece surface, thereby machining the workpiece; sensing an acoustic emission from the workpiece being machined to provide a control signal; and in response to the control signal, controlling at least one of the energy and the energy density of the beam and the rate of relative displacement between the beam and the workpiece.
Claim 3
Dependent Claim
38 words
A according to 2 . method claim 1 wherein said beam is a beam of energetic particles and said energy of the beam is controlled by controlling the velocity of the energetic particles impinging on the workpiece surface.
Claim 4
Dependent Claim
42 words
A according to 3. method claim 2 wherein said energetic particles comprise at least in part charged particles selected from the group which consists of electrons and ions and said velocity is controlled by controlling the acceleration voltage for said charged particles.
Claim 5
Dependent Claim
55 words
A according to 4. The method claim 1 wherein said beam is a beam of energetic particles which comprise at least in part charged particles selected from the group which consists of electrons and ions and said energy density is controlled by controlling the extraction voltage for extracting said charged particles from a source thereof.
Claim 6
Dependent Claim
28 words
A according to 5. method claim 1 wherein said beam is a laser beam and said energy is controlled by controlling the pumping energy for producing the laser.
Claim 7
Dependent Claim
29 words
A according to 6. method claim 1 wherein said beam is a laser beam and said energy density is controlled by controlling the rate of convergence of said laser.
Claim 8
Dependent Claim
41 words
A according to 7. method claim 1 wherein said workpiece is displaced relative to said beam incrementally in response to a sequence of drive pulses and said rate of relative displacement is controlled by controlling the frequency of said drive pulses.
Claim 9
Independent Claim
111 words
An apparatus for machining a workpiece with an energy beam, comprising: a beam generator; carriage means for positioning the workpiece in the path of said energy beam from the generator; means for relatively displacing the beam generator and the carriage means to cause said energy beam to move along a prescribed path on the surface of the workpiece; detector means for sensing an acoustic emission from being machined the workpiece to provide a control signal; and control means responsive to said control signal for controlling at least one of the energy and the energy density of said beam and the rate of relative displacement between said generator and said carriage means.
Claim 10
Independent Claim
111 words
An apparatus for machining a workpiece with an energy beam, comprising: a beam generator; carriage means for positioning the workpiece in the path of said energy beam from the generator; means for relatively displacing the beam generator and the carriage means to cause said energy beam to move along a prescribed path on the surface of the workpiece; detector means for sensing an acoustic emission from being machined the workpiece to provide a control signal; and control means responsive to said control signal for controlling at least one of the energy and the energy density of said beam and the rate of relative displacement between said generator and said carriage means.
Claim 11
Dependent Claim
57 words
An according to 9. apparatus claim 8 wherein said beam generator is adapted to generate a beam of energetic particles constituting said energy beam and includes means for accelerating said energy beam for impingement upon said workpiece surface and said control means is connected to said acceleration means for controlling the kinetic energy of said energetic particles.
Claim 12
Dependent Claim
57 words
An according to 10. apparatus claim 9 wherein said energetic such as particles comprise at least in part charged particles, or electrons ions, said acceleration means comprises a voltage supply for applying an accelerating voltage to said charged particles and said control means is connected to said voltage supply for controlling the magnitude of said accelerating voltage.
Claim 13
Dependent Claim
55 words
An according to 1 1. apparatus claim 8 wherein said generator is adapted to generate a beam of charged particles and includes a power supply for extracting said charged particles from a source thereof and said control means is connected to said power supply for controlling the density of said charged particles in said beam.
Claim 14
Dependent Claim
50 words
An according to . 12. apparatus claim 8 wherein said generator is adapted to generate a laser beam constituting said energy beam and includes a pumping power supply for the laser, and said control means is connected to said pumping power supply for controlling said energy of the beam. i
Claim 15
Dependent Claim
49 words
An according to 13. apparatus claim 8 wherein said displacement means include motor means driven by a succession of drive pulses for displacing said workpiece relative to said generator and said control means is operative in response to said control signal for controlling the frequency of said drive pulses.
Claim 16
Dependent Claim
15 words
A product made by a method according to any one of claims 1 to 7.
Claim 17
Dependent Claim
18 words
A product made with the use of an apparatus according to any one of claims 8 to 13.
References Cited (Backward Citations)
No citation records indexed.
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