EP0061939A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
The provision of conductors in electronic devices
Assignee: Fujitsu Ltd
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Filing: 1982-03-31
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Granted: —
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Expires: 2002-03-31
Abstract
Abstract Conductor strips (13) required in an electronic device are formed by an electron-beam lithography process in which a layer of electron-sensitive positive resist is formed on a conductive layer and is selectively exposed by means of an electron beam so as to produce a latent image pattern made up of thin lines (14) whereby the required conductor strips of the device are outlined. The positive resist layer is developed, and then etched, so that the pattern of thin lines is etched through the conductive layer. The pattern is such that the remaining material of the conductive layer constitutes not only the required conductor strips but also residual portions that are electrically separated from the required conductor strips.
Inventors
- 👤 Hiroshi Yasuda
- 👤 Yasutaka Ban
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-30 22:10
CPC Classifications
H; H10; H10P; H10P95/00; H10P76/00; H10P76/20; H10P76/204; H10P76/2045; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/063; H10W20/40; H10W20/41; H10W20/435; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24273; Y10T428/24322; Y10T428/24331; Y10T428/24802; Y10T428/24917
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
80 words
An electronic device in which electrical interconnections are provided by conductor strips (13) formed from a conductive layer by removing from that layer a pattern of thin lines (14) whereby the said conductor strips were outlined, the said pattern being such that the remaining material of the conductor layer forms not only the said conductor strips but also residual portions that are electrically separated from the said conductor strips and are not used to provide electrical interconnections within the device.
Claim 2
Dependent Claim
80 words
An electronic device in which electrical interconnections are provided by conductor strips (13) formed from a conductive layer by removing from that layer a pattern of thin lines (14) whereby the said conductor strips were outlined, the said pattern being such that the remaining material of the conductor layer forms not only the said conductor strips but also residual portions that are electrically separated from the said conductor strips and are not used to provide electrical interconnections within the device.
Claim 3
Independent Claim
141 words
A method of manufacturing an electronic device, comprising the steps of: forming a conductive layer on a surface of part of the device; forming an electron-sensitive positive resist layer on the said conductive layer; selectively exposing the resist layer by means of an electron beam so as to form a latent image pattern made up of thin lines whereby required conductor strips of the device are outlined; and subjecting the said resist layer to development and then to etching so that the said pattern of thin lines is etched through the conductive layer; the said pattern being such that the remaining material of the said conductive layer constitutes not only the said required conductor strips but also residual portions that are electrically separated from the required conductor strips and are not used to provide electrical interconnections within the said electronic device.
Claim 4
Independent Claim
141 words
A method of manufacturing an electronic device, comprising the steps of: forming a conductive layer on a surface of part of the device; forming an electron-sensitive positive resist layer on the said conductive layer; selectively exposing the resist layer by means of an electron beam so as to form a latent image pattern made up of thin lines whereby required conductor strips of the device are outlined; and subjecting the said resist layer to development and then to etching so that the said pattern of thin lines is etched through the conductive layer; the said pattern being such that the remaining material of the said conductive layer constitutes not only the said required conductor strips but also residual portions that are electrically separated from the required conductor strips and are not used to provide electrical interconnections within the said electronic device.
Claim 5
Dependent Claim
17 words
A method as claimed in claim 2, wherein the said latent image pattern is a rectilinear pattern.
Claim 6
Dependent Claim
25 words
A method as claimed in claim 2 or 3, wherein the said surface is the free surface of an insulating layer formed on a substrate.
References Cited (Backward Citations)
No citation records indexed.
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