EP0061887A1
Expired / Lapsed
EP
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A method of producing a resistance element for a resistance thermometer
Assignee: Emerson Process Management Ltd
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Filing: 1982-03-23
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Granted: —
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Expires: 2002-03-23
Abstract
Abstract A resistance thermometer element having a thin layer of platinum metal on an insulating substrate is formed by magnetron sputtering in a gaseous atmosphere containing at least 10% by volume of oxygen. Any balance gas has less than 10% by volume of krypton and xenon. The atmosphere may have up to 100% oxygen with any balance gas being inert to platinum. Air can be used. A planar magnetron may be used.
Inventors
- 👤 James Stewart Johnston
- 👤 Leslie Holland
- 👤 Christopher R. Wright
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-05 10:49
CPC Classifications
H; H01; H01C; H01C7/00; H01C7/22; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/0036; G; G01; G01K; G01K7/00; G01K7/16; G01K7/18; H01C17/00; H01C17/06; H01C17/075; H01C17/12
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
64 words
A method of producing a resistance element for a resistance thermometer of the form comprising a thin layer of platinum metal on an insulating substrate, comprising applying the platinum to the substrate by magnetron sputtering in a gaseous atmosphere consisting of at least 10% by volume of oxygen, any balance gas providing less than 10% by volume of krypton and xenon in the atmosphere.
Claim 2
Independent Claim
64 words
A method of producing a resistance element for a resistance thermometer of the form comprising a thin layer of platinum metal on an insulating substrate, comprising applying the platinum to the substrate by magnetron sputtering in a gaseous atmosphere consisting of at least 10% by volume of oxygen, any balance gas providing less than 10% by volume of krypton and xenon in the atmosphere.
Claim 3
Dependent Claim
27 words
A method as claimed in Claim 1 and including heat treating the thin platinum layer after sputtering at between 700°C and 1200°C for at least 5 hours.
Claim 4
Dependent Claim
21 words
A method as claimed in Claim 2 wherein said heat treating is carried out for at least 5 to 10 hours.
Claim 5
Dependent Claim
18 words
A method as claimed in Claim 3 wherein said heat treating is carried out for about 20 hours.
Claim 6
Independent Claim
34 words
A method as claimed in any of Claims 2 to 4 and including the further step, after said heat treating, of scribing the platinum layer with a laser to form an extended path thereof.
Claim 7
Dependent Claim
34 words
A method as claimed in Claim 5 and including the further step, after said laser scribing, of further heat treating the scribed platinum layer at between 700°C and 1200°C for at least 1 hour.
Claim 8
Independent Claim
18 words
A method as claimed in any preceding claim wherein said gaseous atmosphere contains substantially no krypton or xenon.
Claim 9
Independent Claim
16 words
A method as claimed in any preceding claim wherein said gaseous atmosphere consists primarily of oxygen.
Claim 10
Dependent Claim
14 words
A method as claimed in claim 8 wherein said gaseous atmosphere is pure oxygen.
Claim 11
Independent Claim
33 words
A method as claimed in any of claims 1 to 8 wherein said gaseous atmosphere is at least 20% by volume of oxygen with the balance of gas, which is inert to platinum.
Claim 12
Dependent Claim
19 words
A method as claimed in claim 10 wherein said gaseous atmosphere is at least 50% by volume of oxygen.
Claim 13
Independent Claim
29 words
A method as claimed in any of claims 1 to 8 wherein said gaseous atmosphere is about 20% by volume of oxygen with the balance consisting primarily of nitrogen.
Claim 14
Dependent Claim
15 words
1 3. A method as claimed in claim 12 wherein said gaseous atmosphere is air.
Claim 15
Independent Claim
17 words
A method as claimed in any preceding claim wherein the sputtering target used is 99.99% pure platinum.
Claim 16
Independent Claim
24 words
A method as claimed in any preceding claim wherein the pressure of said gaseous atmosphere is between 10 -3 Torr and 10 -2 Torr.
Claim 17
Independent Claim
26 words
A method as claimed in any of claims 1 to 14 wherein the pressure of said gaseous atmosphere is between 10 -2 Torr and 10-1 Torr.
Claim 18
Dependent Claim
19 words
A method as claimed in claim 15 wherein the pressure is between 4x10 -3 T orr.and 6x10 -3 Torr.
Claim 19
Dependent Claim
19 words
A method as claimed in claim 15 wherein the pressure is between 6x10 -3 Torr and 9x10 -3 Torr.
Claim 20
Independent Claim
13 words
A method as claimed in any preceding claim and using a planar magnetron.
Claim 21
Dependent Claim
26 words
A method as claimed in claim 19 wherein the magnetron is arranged to confine electrons to drift in a closed path perpendicular to an electric field.
Claim 22
Dependent Claim
14 words
A method as claimed in claim 20 wherein the closed path is generally circular.
Claim 23
Dependent Claim
11 words
A resistance element produced by the method of any preceding claim.
Claim 24
Dependent Claim
12 words
A resistance thermometer having a resistance element as claimed in Claim 22.
References Cited (Backward Citations)
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