Planar type semiconductor device with a high breakdown voltage
Abstract
Abstract A planar type semiconductor device with a high breakdown voltage has a diffusion region (2) of P type formed in a semiconductor layer (1) of N type, at least one guard ring region (7a, 7b) of P type provided surrounding the diffusion region, and an insulating film (3) covering a given portion on a surface of the semiconductor layer of N type. The planar type semiconductor device is further comprised of a first field plate (9a) kept at the potential equal to that of the diffusion region, and a second field plate (9b) which is provided on the insulating film outside a guard ring region and is kept at the potential equal to that of the guard ring region.
Inventors
- 👤 Akio C/O Prof. David H. Navon Nakagawa
- 👤 Tadashi Utagawa
- 👤 Tsuneo Tsukakoshi
Bibliographic Details
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