EP0055800A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
A method of depositing a polymer film on a substrate
Assignee: International Business Machines Corp
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Filing: 1981-10-09
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Granted: —
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Expires: 2001-10-09
Abstract
Abstract This invention relates to a method of depositing a polymer film on a substrate. The substrate is placed in a chamber, and an aromatic silane monomer which contain hydrogen only as part of a phenyl group or attached to a silicone atom is supplied to the chamber. The monomer in the chamber is subjected to a radio frequency glow discharge at a substrate temperature from 50°C to 450°C and at a pressure between 4 and 133.32 pascals whereby the monomer is polymerised and deposited on the substrate.
Inventors
- 👤 Ivan Haller
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-28 16:10
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; C; C08; C08G; C08G77/00; C08G77/04; C08G77/06; H; H05; H05K; H05K3/00; H05K3/22; H05K3/28; H05K3/284
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
81 words
A method of depositing a polymer film on a substrate comprising placing the substrate in a chamber, supplying into the chamber an aromatic silane monomer which contain hydrogen only as part of a phenyl group or attached to a silicone atom, subjecting the monomer to a radio frequency glow discharge at a substrate temperature from 50°C to 450°C and at a pressure between 4 and 133.32 pascals (0.03 and 1 torr) whereby the monomer is polymerised and deposited on the substrate.
Claim 2
Independent Claim
81 words
A method of depositing a polymer film on a substrate comprising placing the substrate in a chamber, supplying into the chamber an aromatic silane monomer which contain hydrogen only as part of a phenyl group or attached to a silicone atom, subjecting the monomer to a radio frequency glow discharge at a substrate temperature from 50°C to 450°C and at a pressure between 4 and 133.32 pascals (0.03 and 1 torr) whereby the monomer is polymerised and deposited on the substrate.
Claim 3
Dependent Claim
13 words
A method as claimed in claim 1, in which the monomer is phenylsilane.
Claim 4
Dependent Claim
13 words
A method as claimed in claim 1, in which the monomer is diphenylsilane.
Claim 5
Dependent Claim
13 words
A method as claimed in claim 1, in which the monomer is disilylbenzene.
Claim 6
Dependent Claim
13 words
A method as claimed in claim 1, in which the monomer is parachlorophenylsilane.
Claim 7
Independent Claim
26 words
A method as claimed in any one of the preceding claims, in which RF power of 1.5 to 2 watt is applied for the glow discharge.
References Cited (Backward Citations)
No citation records indexed.
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