EP0052901A1
Expired / Lapsed
EP
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Method of producing integrated optical waveguide circuits and circuits obtained by means of this method
Assignee: Koninklijke Philips NV
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Filing: 1981-10-30
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Granted: —
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Expires: 2001-10-30
Abstract
Abstract Optical waveguide circuits, such as signal splitters can be produced by etching grooves in a transparent substrate and by filling said grooves with glass having a higher refractive index than the material of the substrate. Two substrates can be placed on top of each other with the surfaces in which the filled grooves have been provided in mutual contact so as to form a laminated integrated optical waveguide circuit.
Inventors
- 👤 Giok Djan Khoe
- 👤 Hendrikus Gerardus Kock
- 👤 Dieter Küppers
- 👤 Hans-Jürgen Lydtin
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-24 01:22
CPC Classifications
C; C03; C03C; C03C17/00; C03C17/02; G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/125; G02B6/13; G02B6/136
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
122 words
-1. A method of producing an integrated optical wave- guide circuit in which a substrate of glass is provided with grooves corresponding to the desired circuit pattern, glass having a refractive index which is higher than the refractive index of the substrate being deposited on the substrate in such a manner that the grooves are filled whereafter the deposited layer is removed to such an extent that the glass of a higher refractive index only remains behind in the grooves , characterized in that the substrate is provided with grooves having a substantially semicircular cross-section and that glass is directly deposited from the gas phase onto the substrate, while filling the grooves, by means of a non-isothermal plasma-activated chemical vapour deposition process.
Claim 2
Dependent Claim
26 words
A method as claimed in Claim 1, characterized in that the grooves are provided by etching the surface of the substrate to form a predetermined pattern.
Claim 3
Dependent Claim
29 words
A method as claimed in Claim 1, characterized in that a glass film of SiO 2 doped with Si 3N4 is deposited onto the substrate while filling the grooves.
Claim 4
Independent Claim
89 words
A method of producing a laminated integrated optical waveguide circuit using integrated optical waveguides produced by the methods according to the preceding Claims 1-3, characterized in that a substrate portion is provided with a predetermined pattern of grooves having a substantially semicircular cross-section, another substrate- portion is provided with the mirror-image of the same pattern of grooves having a substantially semicircular cross-section, the substrate portions being superposed so that the patterns of glass-filled grooves abut and are in registration and form a circuit of waveguides having substantially circular cross-sections.
Claim 5
Dependent Claim
19 words
-5.--- An optical waveguide circuit obtained by means of -the -me thod-claimed in any of the Claims- 1-4. -
References Cited (Backward Citations)
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