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EP0052892A2 Expired / Lapsed EP ⏱️ 0.0 years remaining

Laser beam scanning system

Assignee: Hitachi Ltd
•
Filing: 1981-11-26
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Granted: —
•
Expires: 2001-11-26
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Abstract

Abstract Herein disclosed is a laser beam scanning system for focussing a laser beam (21) to a fine spot and for scanning precisely a large field, which system comprises an acoustooptical deflector (6, 7) enabled to deflect the laser beam (21) in the direction of one axis or in the directions of two axes while maintaining the fine spot diameter, to scan a small field, a relay lens (8) for projecting said deflection point to the center of an objective lens (9), the objective lens effecting the focussing to the fine spot, a high speed and accuracy carriage (11, 12) capable of moving in the biaxial directions, a precise position detector (10, 15) enabled to detect the position of said carriage (11, 12), and a controller (19, 20) for organically controlling the aforementioned respective functions thereby enabling a precise deflecting of the laser beam (21) over a large field. A scanning operation of a large field is thus performed by the laser beam at high speed and high accuracy.

Inventors

  • 👤 Sumio Hosaka
  • 👤 Tatsuo Harada
  • 👤 Akihiro Takanashi

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-31 11:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70383; G03F7/704; G02; G02B; G02B26/00; G02B26/08; G02B26/10; G02B26/108; G02F; G02F1/00; G02F1/29; G02F1/33

Claims Analysis

Total Claims: 6
Claim 1
Independent Claim 130 words
A laser beam scanning system for scanning the surface of a specimen (18) with a laser beam (2) having a fine spot diameter, comprising: an acousto-optical deflector (6, 7) for deflecting a finely focussed incident laser beam at high speed within a small field; an objective lens (9) for focussing the laser beam (21) from said deflector (6, 7) to a spot having a fine diamter upon the surface of the specimen.(18); a relay lens (8) interposed between said acousto-optical deflector (6, 7) and said objective lens (9) for projecting the laser beam deflecting point toward the center of said objective lens (9); and a specimen carriage (11, 12) for moving said specimen (18) in the directions of two axes (X, Y) in a parallel plane to said specimen surface.
Claim 2
Dependent Claim 130 words
A laser beam scanning system for scanning the surface of a specimen (18) with a laser beam (2) having a fine spot diameter, comprising: an acousto-optical deflector (6, 7) for deflecting a finely focussed incident laser beam at high speed within a small field; an objective lens (9) for focussing the laser beam (21) from said deflector (6, 7) to a spot having a fine diamter upon the surface of the specimen.(18); a relay lens (8) interposed between said acousto-optical deflector (6, 7) and said objective lens (9) for projecting the laser beam deflecting point toward the center of said objective lens (9); and a specimen carriage (11, 12) for moving said specimen (18) in the directions of two axes (X, Y) in a parallel plane to said specimen surface.
Claim 3
Dependent Claim 29 words
The laser beam scanning system of claim 1, wherein said acousto-optical deflector (6, 7) is adapted to deflect the incident laser beam (21) in the direction of one axis.
Claim 4
Dependent Claim 30 words
The laser beam scanning system of claim 1, wherein said acousto-optical deflector (6, 7) is adapted to deflect the incident laser beam (21) in the directions of the two axes.
Claim 5
Dependent Claim 34 words
4 . The laser beam scanning system of any of claims 1 to 3, further comprising an optical modulator (3) for modulating the laser beam (2) which incides upon said acousto-optical deflector (6, 7).
Claim 6
Dependent Claim 54 words
The laser beam scanning system of any of claims 1 to 4, further comprising a position detector (10, 15) for detecting the position of said specimen carriage (11, 12), and means (19, 20) for correcting the input signal to said acousto-optical deflector (6, 7) in response to the output signal of said position detector.

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