EP0048884A2
Expired / Lapsed
EP
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Vacuum evaporation system for deposition of thin films
Assignee: Panasonic Holdings Corp
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Filing: 1981-09-15
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Granted: —
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Expires: 2001-09-15
Abstract
Abstract A blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film-substrate holder and an evaporation source in such a way that the blower, the dust collector and the process chamber constitute a closed circuit.
Inventors
- 👤 Koichi Shinohara
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-09 03:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/56; C23C14/564
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
45 words
A vacuum evaporation system for the deposition of thin films characterized in that a blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film substrate holder and an evaporation source.
Claim 2
Dependent Claim
45 words
A vacuum evaporation system for the deposition of thin films characterized in that a blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film substrate holder and an evaporation source.
Claim 3
Dependent Claim
64 words
A vacuum evaporation system for the deposition of thin films characterized in that a blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film substrate holder and an evaporation source in such a way that said blower, said dust collector and said evacuated process chamber constitute a closed circuit.
Claim 4
Dependent Claim
64 words
A vacuum evaporation system for the deposition of thin films characterized in that a blower and a dust collector are communicated through valves with an evacuated process chamber in which are disposed one or more sets of a film substrate holder and an evaporation source in such a way that said blower, said dust collector and said evacuated process chamber constitute a closed circuit.
Claim 5
Dependent Claim
33 words
A vacuum evaporation system for the deposition of thin films as set forth in Claim 1 further characterized in that said film substrate holder is a deposition drum which guides a tape-like substrate.
Claim 6
Dependent Claim
41 words
A vacuum evaporation system for the deposition of thin films as set forth in . Claim 3 further characterized in that said deposition drum is rorated in the direction opposite to the direction of the flow of air from said blower.
References Cited (Backward Citations)
No citation records indexed.
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