EP0044610A2
Expired / Lapsed
EP
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Infrared imaging system
Assignee: Texas Instruments Inc
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Filing: 1981-06-05
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Granted: —
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Expires: 2001-06-05
Abstract
Abstract An infrared charge transfer device (CTD) imager system is disclosed which includes an optic system, a charge transfer device detector matrix and a signal processor. The optic system focuses infrared energy from a scene onto the detector matrix 10. The detector matrix 10 produces electrical signals representative of the impinging energy and the signal processor processes the electrical signals into video signals. The CTD detector matrix 10 comprises a plurality of charge injection devices (CID). Each CID has an IR sensitive area, and two metal'insulator/semiconductor gate electrodes 22, 28 surrounded by a field plate 18. One, a column gate electrode 22, is centrally located within the IR sensitive area and the other, a row gate electrode 28, surrounds the column gate electrode 22. In one embodiment, the field plate 18 and column gate electrode 22 are in a spaced but overlapping relationship with minimum overlap, and the row gate electrode 28 is in a spaced relationship to the field plate 18 and column gate electrode 22 whereby the electric field generated between the edges (corners in particular) of the field plate 18 and column 22 and row 28 gate electrodes is substantially reduced. The column electrode 22 is formed as an integral part of the column read line metallization.
Inventors
- 👤 Richard A. Chapman
- 👤 Michael A. Kinch
- 👤 Jaroslav Hynecek
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 06:31
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/15; H10F39/157; H04; H04N; H04N23/00; H04N23/20
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
74 words
An infrared imager system comprising: a) means for focusing infrared energy emanating from a scene; b) an infrared detector matrix in the path of the focused infrared energy for converting the infrared energy into electrical signals said infrared detector matrix comprising a plurality of charge transfer device cells having means for substantially reducing dark current therein; and c) a signal processor for processing the electrical signals of the infrared detector matrix into video signals.
Claim 2
Dependent Claim
74 words
An infrared imager system comprising: a) means for focusing infrared energy emanating from a scene; b) an infrared detector matrix in the path of the focused infrared energy for converting the infrared energy into electrical signals said infrared detector matrix comprising a plurality of charge transfer device cells having means for substantially reducing dark current therein; and c) a signal processor for processing the electrical signals of the infrared detector matrix into video signals.
Claim 3
Dependent Claim
22 words
An infrared imager system according to Claim 1 wherein the plurality of charge transfer device cells are charge injection device detector elements.
Claim 4
Dependent Claim
127 words
An infrared imager system comprising: a) means for focusing infrared energy emanating from a scene; b) an infrared detector matrix in the path of the focused infrared energy for converting the infrared energy into electrical signals, said detector matrix having a plurality of charge injection device (CID's) detector elements, each charge injection device detector element having a substrate of semiconductor material, a plurality of electrodes on said substrate, said plurality of electrodes including a first electrode centrally disposed as to a second electrode, said electrodes operative to store charges generated by the infrared energy impinging on the CID element said charges producing changes in voltages representative of impinging infrared energy; and c) means for producing video signals from the voltage changes representative of the impinging infrared energy.
Claim 5
Dependent Claim
127 words
An infrared imager system comprising: a) means for focusing infrared energy emanating from a scene; b) an infrared detector matrix in the path of the focused infrared energy for converting the infrared energy into electrical signals, said detector matrix having a plurality of charge injection device (CID's) detector elements, each charge injection device detector element having a substrate of semiconductor material, a plurality of electrodes on said substrate, said plurality of electrodes including a first electrode centrally disposed as to a second electrode, said electrodes operative to store charges generated by the infrared energy impinging on the CID element said charges producing changes in voltages representative of impinging infrared energy; and c) means for producing video signals from the voltage changes representative of the impinging infrared energy.
Claim 6
Dependent Claim
38 words
An infrared imaging system according to Claim 3 wherein each of said CID's of the infrared detector matrix further include a field plate and biasing means for biasing the field plate for reducing substantially the surface charge accumulation.
Claim 7
Dependent Claim
45 words
An infrared imager system according to Claim 4 wherein the substrate of semiconductor material has a first layer of insulating material said first layer of insulating material bearing the field plate of each CID, said field plate defining the area of the CID detector element.
Claim 8
Dependent Claim
50 words
An infrared imager system according to Claim 5 wherein the CID detector element further includes a second insulating layer, and a column gate and column gate read line metalization mounted upon the second insulating layer, said column gate, first and second insulating layers and substrate forming the column gate electrode.
Claim 9
Dependent Claim
28 words
An infrared imager system according to Claim 6 wherein the second layer insulator further includes a field plate protect comprising an increased thickness portion above the field plate.
Claim 10
Dependent Claim
44 words
An infrared imager system according to Claim 6 or 7 wherein the CID detector element further includes a third insulating layer, metal layer region forming the second or row MIS electrode said metal layer region transparent to IR energy, and a row address line.
Claim 11
Dependent Claim
37 words
An infrared imager system according to Claim 5 further including a column gate mounted on the first layer of insulating material in a spaced relationship to the field plate formed on the first layer of insulating material.
Claim 12
Dependent Claim
35 words
An infrared imager system according to Claim 9 further including a second insulating layer covering the field plate and column gate, and a transparent region and row address metalization on the second layer of insulation.
Claim 13
Dependent Claim
41 words
An infrared imager system according to Claim 10 further including a third insulating layer for covering the transparent region metal, a column read line metalization on said third insulating layer, and a via interconnecting the column gate and column read line.
Claim 14
Dependent Claim
174 words
An infrared imager system comprising: a) means for focusing infrared energy emanating from a scene; b) an infrared detector matrix for receiving the focused infrared energy and generating electrical signals in response to the intensity thereof said detector matrix comprising a plurality of CID detector elements having a common substrate of semiconductor material of preselected conductivity type, said substrate having a native oxide layer, a first insulating layer on the native oxide layer, an apertured field plate metalization on the first insulating layer, the apertures of said apertured field plate defining the location of each of the plurality of CID detector elements, the edges of the field plate forming polygonal apertures having blunted corners, and column gates mounted in a spaced relationship with the field plate, said column gate having a polygonal shape and blunted corners corresponding to the shape of the field plate apertures whereby the electrical fields found at the corners are reduced substantially; and c) a signal processor for processing the electrical signals of the infrared detector matrix into video signals.
Claim 15
Dependent Claim
174 words
An infrared imager system comprising: a) means for focusing infrared energy emanating from a scene; b) an infrared detector matrix for receiving the focused infrared energy and generating electrical signals in response to the intensity thereof said detector matrix comprising a plurality of CID detector elements having a common substrate of semiconductor material of preselected conductivity type, said substrate having a native oxide layer, a first insulating layer on the native oxide layer, an apertured field plate metalization on the first insulating layer, the apertures of said apertured field plate defining the location of each of the plurality of CID detector elements, the edges of the field plate forming polygonal apertures having blunted corners, and column gates mounted in a spaced relationship with the field plate, said column gate having a polygonal shape and blunted corners corresponding to the shape of the field plate apertures whereby the electrical fields found at the corners are reduced substantially; and c) a signal processor for processing the electrical signals of the infrared detector matrix into video signals.
Claim 16
Dependent Claim
174 words
An imager system comprising: a) means for focusing light energy emanating from a scene; b) a detector matrix for receiving the focused light energy and generating electrical signals in response to the intensity thereof said detector matrix comprising a plurality of CID detector elements having a common substrate of semiconductor material of preselected conductivity type, a first layer of insulating material on the substrate, an apertured field plate on the first layer of insulating material, a second layer of insulating material on the apertured field plate, column electrodes and column read lines on the second layer of insulating material, said column electrodes being centrally located with respect to the apertures of the apertured field plate and said column read lines substantially reduced in width with respect to the column electrode whereby any resulting electric field generated between the field plate and column electrodes, and the field plate and column read lines are substantially reduced; and c) means connected to the detector matrix for producing video signals from the electrical outputs of the detector matrix.
Claim 17
Dependent Claim
174 words
An imager system comprising: a) means for focusing light energy emanating from a scene; b) a detector matrix for receiving the focused light energy and generating electrical signals in response to the intensity thereof said detector matrix comprising a plurality of CID detector elements having a common substrate of semiconductor material of preselected conductivity type, a first layer of insulating material on the substrate, an apertured field plate on the first layer of insulating material, a second layer of insulating material on the apertured field plate, column electrodes and column read lines on the second layer of insulating material, said column electrodes being centrally located with respect to the apertures of the apertured field plate and said column read lines substantially reduced in width with respect to the column electrode whereby any resulting electric field generated between the field plate and column electrodes, and the field plate and column read lines are substantially reduced; and c) means connected to the detector matrix for producing video signals from the electrical outputs of the detector matrix.
Claim 18
Dependent Claim
175 words
An imager system comprising: a) means for focusing light energy emanating from a scene; b) a detector matrix for receiving the focused light energy and generating electrical signals in response to the intensity thereof, said detector matrix having a plurality of CID detector elements having a common substrate of semiconductor material of preselected conductivity type, a first layer of insulating material on the substrate, an apertured field plate on the first layer of insulating material, column electrodes centrally disposed within the aperture of the apertured field plate, a second layer of insulating material on the apertured field plate, vias formed in the second layer of insulating material to the column electrodes and column read lines on the second layer of insulating material and contacting the column electrodes through the vias whereby any electrical fields between the apertured field plate and column electrodes and between the apetured field plate and column read lines are substantially reduced; and c) means connected to the detector matrix for producing video signals from the electrical outputs of the detector matrix.
Claim 19
Dependent Claim
175 words
An imager system comprising: a) means for focusing light energy emanating from a scene; b) a detector matrix for receiving the focused light energy and generating electrical signals in response to the intensity thereof, said detector matrix having a plurality of CID detector elements having a common substrate of semiconductor material of preselected conductivity type, a first layer of insulating material on the substrate, an apertured field plate on the first layer of insulating material, column electrodes centrally disposed within the aperture of the apertured field plate, a second layer of insulating material on the apertured field plate, vias formed in the second layer of insulating material to the column electrodes and column read lines on the second layer of insulating material and contacting the column electrodes through the vias whereby any electrical fields between the apertured field plate and column electrodes and between the apetured field plate and column read lines are substantially reduced; and c) means connected to the detector matrix for producing video signals from the electrical outputs of the detector matrix.
References Cited (Backward Citations)
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