EP0035844A2
Expired / Lapsed
EP
⏱️ 0.0 years remaining
Material handling system and method for manufacturing line
Assignee: Texas Instruments Inc
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Filing: 1981-02-25
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Granted: —
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Expires: 2001-02-25
Abstract
Abstract Disclosed for use in a manufacturing line is a material handling system which can be utilized for electronic component manufacturing, such as semiconductor slices, at subatmospheric conditions. The articles to be subjected to various manufacturing steps are moved serially on a track of gas or air. At a work station which requires a manufacturing operation to be performed at subatmospheric conditions e.g., a vacuum, the article is initially loaded into an input air lock which incorporates a magazine loader capable of storing and conveying such articles into a manufacturing processing station operating at subatmospheric conditions. Once the input air lock system is loaded, the entrance gate to such air lock is closed and the air lock system is evacuated to match the subatmospheric pressure of the manufacturing processing work station. When the pressures are matched, an exit gate in the input air lock system opens and a slidable air track located in an interim chamber is coupled with the interior of the manufacturing station. Pulses of compressed gas are utilized to transfer the articles from the input air lock, through the interim chamber to the manufacturing processing station. The articles are then processed in such station. At the conclusion of the manufacturing step, the articles are unloaded and transferred through an output interim chamber to an output air lock which is at the same subatmospheric pressure as the manufacturing processing work station. The articles are transferred from such work station using pulses of compressed gas until the output air lock is fully loaded. When fully loaded, the exit gate associated with said output air lock is closed and the output air lock is raised to atmospheric pressure. The articles are unloaded for further processing or disposition.
Inventors
- 👤 Paul L. Whelan
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-03 15:59
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/30; H10P72/36; H10P72/3604; B; B65; B65G; B65G51/00; B65G51/02; B65G51/03; C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/564; C23C14/566; C23C14/568; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/137; Y10S414/139
Claims Analysis
Total Claims: 35
Claim 1
Independent Claim
76 words
A line for manufacturing an article comprising: a plurality of work stations, each of said work stations performs at least one manufacturing operation and at least one of said plurality of stations operates at subatmospheric pressures, storage means operatively connected to said subatmospheric work station for loading and unloading articles therefrom at atmospheric and subatmospheric pressures, and gas transport means for transporting said article at subatmospheric pressures between said storage means and said subatmospheric work station.
Claim 2
Dependent Claim
76 words
A line for manufacturing an article comprising: a plurality of work stations, each of said work stations performs at least one manufacturing operation and at least one of said plurality of stations operates at subatmospheric pressures, storage means operatively connected to said subatmospheric work station for loading and unloading articles therefrom at atmospheric and subatmospheric pressures, and gas transport means for transporting said article at subatmospheric pressures between said storage means and said subatmospheric work station.
Claim 3
Dependent Claim
46 words
A manufacturing line according to Claim 1 wherein said gas transport means comprises a guideway and floor member between said guideway and means positioned along a line in said floor member for directing a plurality of article supporting and propelling gas jets through said floor member.
Claim 4
Dependent Claim
20 words
A manufacturing line according to Claim 2 wherein said means positioned along a line comprises a plurality of slanted holes.
Claim 5
Dependent Claim
14 words
A manufacturing line according to Claim 1 wherein said article is a semiconductor slice.
Claim 6
Dependent Claim
27 words
A manufacturing line according to Claim 1 wherein said storage means comprises an air lock system having entrance and exit gate for loading and unloading said article.
Claim 7
Dependent Claim
57 words
A manufacturing line according to Claim 5 wherein said air lock further includes: a gas track system passing through said entrance and exit gate for transporting said articles into and out of said air lock, and article loading means operatively associated with said gas track to allow a plurality of articles to be loaded and unloaded therefrom.
Claim 8
Dependent Claim
55 words
A manufacturing line according to Claim 6 wherein said loading means comprises a article pair of walls on opposite sides of said gas track, means attached to said walls for loading a plurality of articles, and drive means for raising and lowering said article loading means as such article loading means is loaded and unloaded.
Claim 9
Dependent Claim
21 words
A line according to Claim 6 wherein said means attached to said walls comprises structure having a plurality of slots therein.
Claim 10
Independent Claim
87 words
A system for loading and unloading a workpeice at subatmospheric pressures, comprising: a) a housing having first and second gates, b) means for opening and closing said gates, c) gas transfer means for transporting on supporting and propelling jets of gas said workpiece into and out of said first and second gates, d) magazine loader means inside said housing and partially surrounding said gas transfer means for storing said workpiece, and e) means connected to said housing for reducing the pressure therein to a predetermined subatmospheric pressure.
Claim 11
Independent Claim
87 words
A system for loading and unloading a workpeice at subatmospheric pressures, comprising: a) a housing having first and second gates, b) means for opening and closing said gates, c) gas transfer means for transporting on supporting and propelling jets of gas said workpiece into and out of said first and second gates, d) magazine loader means inside said housing and partially surrounding said gas transfer means for storing said workpiece, and e) means connected to said housing for reducing the pressure therein to a predetermined subatmospheric pressure.
Claim 12
Dependent Claim
28 words
A system according to Claim 9 wherein said magazine loader is operatively coupled to a power source which moves said loader as the workpeices are loaded and unloaded.
Claim 13
Dependent Claim
14 words
A system according to Claim 10 wherein said magazine loader is raised and lowered.
Claim 14
Dependent Claim
25 words
A system according to Claim 9 wherein said gas transfer means comprises an elongated floor and guide members positioned on opposite sides of said floor.
Claim 15
Dependent Claim
30 words
A system according to Claim 12 further including sensors in said floor for ensuring accurate placement of said workpieces thereon in order to load said workpieces in said magazine loader.
Claim 16
Dependent Claim
24 words
A system according to Claim 9 wherein said gas transfer means provides impulses of gas in order to accurately transport and stop said workpieces.
Claim 17
Dependent Claim
16 words
A system according to claim 9 wherein said magazine loader includes slots for storing the workpiece.
Claim 18
Dependent Claim
32 words
A system according to Claim 11 further comprising a support plate forming a base for the magazine loader and a drive shaft and motor coupled to said plate for moving said loader.
Claim 19
Dependent Claim
22 words
A system according to Claim 9 wherein said gas transfer means includes a slidable section for engaging and disengaging the work station.
Claim 20
Dependent Claim
64 words
In a manufacturing line, a workpiece handling and transporting system for operation at a subatmospheric pressure comprising: a work station which performs a manufacturing operation on a workpiece at a subatmospheric pressure, storage means operatively associated with said work station for storing said workpiece at said subatmosperic pressure, and gas transport means for moving said workpiece between said storage means and said work station.
Claim 21
Dependent Claim
64 words
In a manufacturing line, a workpiece handling and transporting system for operation at a subatmospheric pressure comprising: a work station which performs a manufacturing operation on a workpiece at a subatmospheric pressure, storage means operatively associated with said work station for storing said workpiece at said subatmosperic pressure, and gas transport means for moving said workpiece between said storage means and said work station.
Claim 22
Dependent Claim
31 words
A workpiece handling and transporting system according to Claim 18 wherein said gas transport means comprises means for directing a plurality of workpiece supporting and propelling jets of gas under pressure.
Claim 23
Dependent Claim
21 words
A workpiece handling and transporting system according to Claim 19 wherein said means for directing supplies impulses of gas under pressure.
Claim 24
Dependent Claim
42 words
A workpiece handling and transporting system according to Claim 18 wherein said storage means comprises an air lock system for receiving said workpiece and means for increasing and decreasing the pressure in said air lock between said subatmospheric pressure and atmospheric pressure.
Claim 25
Dependent Claim
42 words
A workpiece handling and transporting system according to Claim 19 wherein said gas transport means, further includes a slidable section which extends to said work station from said storage means for transporting said workpiece between said storage means and said work station.
Claim 26
Dependent Claim
53 words
A workpiece handling and transporting system according to Claim 18 further including: second storage means coupled to said work station for receiving at said subatmospheric pressure the workpiece after said manufacturing operation is completed, and second gas transport means for moving said completed workpiece between said work station and said second storage means.
Claim 27
Independent Claim
67 words
A method for handling and transporting a workpiece to a manufacturing work station at a subatmospheric pressure comprising the steps of: loading a workpiece into a storage means at atmospheric pressure, reducing the pressure of said storage means to a predetermined subatmospheric pressure, and transporting on a gas transport system said workpiece between said storage means and a manufacturing work station evacuated to said predetermined subatmospheric pressure.
Claim 28
Independent Claim
67 words
A method for handling and transporting a workpiece to a manufacturing work station at a subatmospheric pressure comprising the steps of: loading a workpiece into a storage means at atmospheric pressure, reducing the pressure of said storage means to a predetermined subatmospheric pressure, and transporting on a gas transport system said workpiece between said storage means and a manufacturing work station evacuated to said predetermined subatmospheric pressure.
Claim 29
Dependent Claim
61 words
A method for handling and transporting a workpiece in a manufacturing work station at subatmospheric pressure according to Claim 24 further comprising the steps of: completing at least one manufacturing step on said work piece in said station, and transporting on a gas transfer system said completed workpiece at said subatmospheric pressure from said work station to a second storage means.
Claim 30
Dependent Claim
48 words
A method according to Claim 25 further comprising the steps of: isolating the chamber inside the second storage means from the work station pressure, raising the pressure in said second storage means from said subatmospheric pressure to atmospheric pressure, and unloading said workpiece from said second storage means.
Claim 31
Dependent Claim
24 words
A method according to Claim 24 comprising periodically applying gas to each of the gas transfer systems in order to accurately position the workpiece.
Claim 32
Independent Claim
133 words
A method for handling and transporting a workpiece to a manufacturing work station at a subatmospheric pressure comprising the steps of: transporting a workpiece on a gas transport system to a storage means, loading said workpiece in a workpiece loader in said storage means at atmospheric pressure, indexing said loader to its next position and loading a second workpiece in said loader, repeating steps 1) to 3) until loading is complete, closing all apertures in said storage means and reducing the pressure of said storage means to a predetermined subatmospheric pressure, opening a gate to form an aperture between the storage means and the work station, and transporting through said aperture the workpieces from said storage means on a gas transport system into said manufacturing work station operating at said predetermined atmospheric pressure.
Claim 33
Independent Claim
133 words
A method for handling and transporting a workpiece to a manufacturing work station at a subatmospheric pressure comprising the steps of: transporting a workpiece on a gas transport system to a storage means, loading said workpiece in a workpiece loader in said storage means at atmospheric pressure, indexing said loader to its next position and loading a second workpiece in said loader, repeating steps 1) to 3) until loading is complete, closing all apertures in said storage means and reducing the pressure of said storage means to a predetermined subatmospheric pressure, opening a gate to form an aperture between the storage means and the work station, and transporting through said aperture the workpieces from said storage means on a gas transport system into said manufacturing work station operating at said predetermined atmospheric pressure.
Claim 34
Independent Claim
86 words
A method for unloading a workpiece from a manufacturing work station operating at a subatmospheric pressure, comprising the steps of: 1) performing a manufacturing step on a workpiece at a subatmospheric pressure, 2) transporting a workpiece on a gas transfer system between the work station and a storage means which is also at said subatmospheric pressure, 3) isolating the pressure in said work station from that of said storage means, 4) raising the pressure in said storage means, 5) transporting the workpiece from the storage means.
Claim 35
Independent Claim
86 words
A method for unloading a workpiece from a manufacturing work station operating at a subatmospheric pressure, comprising the steps of: 1) performing a manufacturing step on a workpiece at a subatmospheric pressure, 2) transporting a workpiece on a gas transfer system between the work station and a storage means which is also at said subatmospheric pressure, 3) isolating the pressure in said work station from that of said storage means, 4) raising the pressure in said storage means, 5) transporting the workpiece from the storage means.
References Cited (Backward Citations)
No citation records indexed.
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