Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
129 words
An electrically insulating substrate comprising a sintered body, characterized in that said sintered body consists of 0.1 to 3.5 wt.% of beryllium and silicon carbide as the principal component; that said silicon carbide contains up to 0.1 wt.% of aluminum, up to 0.1 wt.% of boron and up to 0.4 wt.% of free carbon; and that said sintered body is sintered such that a density of at least 90 % relative density with respect to the theoretical density of said silicon carbide is obtained and said sintered body has a thermal conductivity of at least 1.67 J/cm·sec· C at 25°C, an electrical resistivity of at least 10 7 Ohm·cm at 25°C and a coefficient of thermal expansion of up to 4 x 10 -6 /°C from 25°C to 300°C.
Claim 2
Dependent Claim
129 words
An electrically insulating substrate comprising a sintered body, characterized in that said sintered body consists of 0.1 to 3.5 wt.% of beryllium and silicon carbide as the principal component; that said silicon carbide contains up to 0.1 wt.% of aluminum, up to 0.1 wt.% of boron and up to 0.4 wt.% of free carbon; and that said sintered body is sintered such that a density of at least 90 % relative density with respect to the theoretical density of said silicon carbide is obtained and said sintered body has a thermal conductivity of at least 1.67 J/cm·sec· C at 25°C, an electrical resistivity of at least 10 7 Ohm·cm at 25°C and a coefficient of thermal expansion of up to 4 x 10 -6 /°C from 25°C to 300°C.
Claim 3
Dependent Claim
20 words
The substrate of claim 1, characterized in that said silicon carbide consists of alpha-type silicon carbide as the principal component.
Claim 4
Independent Claim
88 words
A method of making an electrically insulating substrate, characterized by mixing 0.5 to 14 wt.% of beryllium oxide powder with silicon carbide powder containing up to 0.1 wt.% of aluminum, up to 0.1 % of boron and up to 0.4 % of free carbon; pressure-molding the mixed powder; sintering the resulting molded article at 1,850 to 2,500 C in a non-oxidizing atmosphere in such a manner as to obtain a sintered body having at least 90 % relative density with respect to the theoretical density of silicon carbide.
Claim 5
Independent Claim
88 words
A method of making an electrically insulating substrate, characterized by mixing 0.5 to 14 wt.% of beryllium oxide powder with silicon carbide powder containing up to 0.1 wt.% of aluminum, up to 0.1 % of boron and up to 0.4 % of free carbon; pressure-molding the mixed powder; sintering the resulting molded article at 1,850 to 2,500 C in a non-oxidizing atmosphere in such a manner as to obtain a sintered body having at least 90 % relative density with respect to the theoretical density of silicon carbide.
Claim 6
Dependent Claim
26 words
The method of claim 3, characterized in that said molded article is hot-pressed at 1,900 to 2,300°C and at a pressure of 100 to 700 bar.
Claim 7
Dependent Claim
25 words
The method of claim 4, characterized in that beryllium oxide powder and silicon carbide powder have an average grain size of up to 10 um.