EP0022618A2
Expired / Lapsed
EP
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Photographic or photolithographic article and method of forming a photoresist
Assignee: University Patents Inc
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Filing: 1980-06-09
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Granted: —
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Expires: 2000-06-09
Abstract
Abstract Photographic and Photolithographic systems are provided which utilize diacetylenic materials as components thereof. Such materials, which include at least two acetylenic bonds in conjugation with one another, provide a combination of both high sensitivity and high resolving power, thus resulting in superior photographic and photolithographic properties. In accordance with a preferred embodiment of the invention, a substrate is coated with at least one layer of a polymerizable composition comprising a diacetylenic species, said layer being organized into a plurality of domains having a substantially regular array of the diacetylenic species. In other embodiments, covalent bonding of the diacetylenic layer to the substrate is accomplished through the use of suitably constituted silane species, thus to provide a highly beneficial adhesion of substrate and photo-or photolithographic layer.
Inventors
- 👤 Anthony Frank Garito
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-10-27 22:37
CPC Classifications
B; B82; B82Y; B82Y20/00; B05; B05D; B05D1/00; B05D1/18; B05D1/20; B05D1/202; B82Y30/00; B82Y40/00; C; C07; C07C; C07C205/00; C07C205/27; C07C205/35; C07C205/36; C07C205/37; C07C57/00; C07C57/18; C07C57/52; C08; C08F; C08F138/00; G; G02; G02F; G02F1/00; G02F1/0009; G02F1/0018; G02F1/35; G02F1/355; G02F1/361; G02F1/3615; G02F1/3618; G03; G03F; G03F7/00; G03F7/004; G03F7/025; G02F1/3515; G02F1/37; G02F1/377; G02F3/00
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
57 words
A process comprising: coating a substrate with at least one layer of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another, and irradiating selected portions of said layer for a time sufficient to cause substantial polymerization of said selected portions.
Claim 2
Dependent Claim
57 words
A process comprising: coating a substrate with at least one layer of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another, and irradiating selected portions of said layer for a time sufficient to cause substantial polymerization of said selected portions.
Claim 3
Dependent Claim
16 words
A process as claimed in Claim 1 wherein said coating is produced by the Langmuir-Blodgett technique.
Claim 4
Dependent Claim
15 words
A process as claimed in' Claim 2 wherein said coating comprises a plurality of layers.
Claim 5
Dependent Claim
16 words
A process as claimed in Claim 1 wherein said layer is bonded to said substrate covalently.
Claim 6
Dependent Claim
14 words
A process as claimed in Claim 4 wherein said covalent bonding includes siloxyl linkages.
Claim 7
Dependent Claim
29 words
A process as claimed in Claim 1 wherein said material has the formula: where R 1 is a hydrophobic chemical moiety and R 2 is a hydrophilic chemical moiety.
Claim 8
Dependent Claim
115 words
A process as claimed in Claim 1 wherein saidmaterial has the formula: where R 3 comprises a hydrocarbyl moiety having from 1 to about 30 carbon atoms and R 4 is represented by the formula: where R 5 is a hydrocarbyl group having from 1 to about 30 carbon atoms, n is an integer from 1 to about 6 and A is selected from the group consisting of COOH, COOR 6 , CONH 2 ,CONHR 6 , CON(R 6 ) 2 , OH, SH, NH 2 , NHR 6 , N(R 6 ) 2 , silyl, sulfate, sulfonate, phosphate and siloxyl where R 6 is a hydrocarbyl having from 1 to about 10 carbon atoms.
Claim 9
Dependent Claim
13 words
A process as claimed in Claim 1 wherein said material is optically active.
Claim 10
Dependent Claim
22 words
A process as claimed in Claim 1 wherein said material comprises three acetylenic bonds, said bonds being in conjugation with one another.
Claim 11
Dependent Claim
16 words
A process as claimed in Claim 1 wherein said layer further comprises a second polymerizable composition.
Claim 12
Dependent Claim
26 words
A process as claimed in Claim 1 wherein said composition further comprises an amount sufficient to reduce thermal polymerization of a dimer of a nitroso compound.
Claim 13
Dependent Claim
14 words
A process as claimed in Claim 1 wherein said material has been substantially fluorinated.
Claim 14
Dependent Claim
57 words
An article comprising a substrate and at least one layer on said substrate of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another said layer comprising a plurality of domains, said domains having a substantially regular array of said composition.
Claim 15
Dependent Claim
57 words
An article comprising a substrate and at least one layer on said substrate of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another said layer comprising a plurality of domains, said domains having a substantially regular array of said composition.
Claim 16
Dependent Claim
14 words
An article as claimed in Claim 13 further comprising a plurality of said layers.
Claim 17
Dependent Claim
18 words
An article as claimed in Claim 13 wherein said layer is bonded to said substrate by covalent linkages.
Claim 18
Dependent Claim
13 words
An article as claimed in Claim 5 wherein said linkages are siloxyl linkages.
Claim 19
Dependent Claim
29 words
An article as claimed in Claim 13 wherein said material has the formula: where R 1 is a hydrophobic chemical moiety and R 2 is a hydrophilic chemical moiety,
Claim 20
Dependent Claim
58 words
An article comprising a substrate, a bonding layer covalently bonded to said substrate, and at least one additional layer of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another, one of said additional layers being covalently bonded to said bonding layer.
Claim 21
Dependent Claim
58 words
An article comprising a substrate, a bonding layer covalently bonded to said substrate, and at least one additional layer of a polymerizable composition comprising at least one material having at least two acetylenic bonds, at least two of said bonds being in conjugation with one another, one of said additional layers being covalently bonded to said bonding layer.
Claim 22
Dependent Claim
119 words
An article as claimed in Claims 13 or 18 wherein said material has the formula: where R 3 comprises a hydrocarbyl moiety having from 1 to about 30 carbon atoms and R 4 is represented by the formula: where R 5 is a hydrocarbyl group having from 1 to about 30 carbon atoms, n is an integer from 1 to about 6 and A is selected from the group consisting of COOH, COOR 6 , CONH 2 , CONHR 6 , CON(R 6 ) 2 , OH, SH, NH 2 , NHR 6 , N(R 6 ) 2 , silyl, sulfate, sulfinate, phosphate, and siloxyl where R 6 is a hydrocarbyl having from 1 to about 10 carbon atoms.
Claim 23
Dependent Claim
15 words
An article as claimed in Claim 13 or 18 wherein said material is optically active.
Claim 24
Dependent Claim
24 words
An article as claimed in Claim 13 or 18 wherein said material has three acetylenic bonds, said bonds being in conjugation with one another.
Claim 25
Dependent Claim
20 words
22, An article as claimed in Claim 13 or 18 wherein said additional layer further comprises a second polymerizable composition.
Claim 26
Dependent Claim
28 words
An article as claimed in Claim 13 or 18 wherein said composition further comprises an amount sufficient to reduce thermal polymerization of a dimer of a nitroso compound.
Claim 27
Dependent Claim
16 words
An article as claimed in Claim 13 or 18 wherein said material has been substantially fluorinated.
Claim 28
Dependent Claim
45 words
An article comprising a substrate, and at least one layer on said substrate having a plurality of regions, at least one of said regions comprising a substantially regularly oriented polymer having subunits, said subunits having at least four carbon atoms in a generally linear geometry.
Claim 29
Dependent Claim
45 words
An article comprising a substrate, and at least one layer on said substrate having a plurality of regions, at least one of said regions comprising a substantially regularly oriented polymer having subunits, said subunits having at least four carbon atoms in a generally linear geometry.
Claim 30
Dependent Claim
19 words
An article as claimed in Claim 13 or 25 wherein said layer has been formed by the Langmuir-Blodgett technique.
Claim 31
Dependent Claim
21 words
An article as claimed in Claim 25 further comprising a bonding layer covalently bonded to said substrate and to said layer.
Claim 32
Dependent Claim
25 words
An article as claimed in Claim 27 wherein said bonding layer comprises a silicon composition and wherein said bonding to said substrate is siloxyl bonding.
References Cited (Backward Citations)
No citation records indexed.
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