EP0013325A2
Expired / Lapsed
EP
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Optical measuring arrangement for determining the distance between edge shaped structures on surfaces
Assignee: International Business Machines Corp
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Filing: 1979-11-27
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Granted: —
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Expires: 1999-11-27
Abstract
Abstract 1. An optical measuring device for determining the spacing between edge-shaped structures on surfaces, especially of line widths, characterized in that focused light from a source (18) is moved along a line across the surface (12) to be tested and the light scattered at the edges is detected by means of two photodetectors (60, 62) arranged symmetrically to the optical axis, and that an electronic evaluator circuit (70) is provided for determining the desired spacing between two edge-shaped structures from the position of the peaks of the signals generated by the two photodetectors.
Inventors
- 👤 Joseph Pennell Kirk
- 👤 Josef Predatsch
- 👤 Lo-Soun Su
Bibliographic Details
Application Number
—
Jurisdiction
EP
Data Source
google_patents
Last Synchronized
2026-11-04 15:51
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/02; G01B11/30; G01B11/306
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