DE4100451A1
Expired / Lapsed
DE
⏱️ 0.0 years remaining
Semiconductor accelerometer suitable for mass prodn. - has film element preventing extensive vibration of wt. at low cost and with high reliability
Assignee: Nissan Motor Co Ltd
•
Filing: 1991-01-09
•
Granted: —
•
Expires: 2011-01-09
Abstract
Abstract A semiconductor accelerometer contains a substrate (101) with a supporting element (11) and a wt. (103) formed in the substrate with a gap (124) between the wt. and the supporting element. The wt. is joined to the substrate by a freely protruding carrier (102) formed in the substrate. A voltage sensor is formed in a surface region formed by the carrier and wt. A film element (301) covering the wt. prevents its movement during excessive acceleration of the sensor. ADVANTAGE - Can be mass-produced using reliable, low-cost mechanism preventing excessive vibration of wt.
Inventors
- 👤 Makoto Uchiyama
- 👤 Hiroyuki Kaneko
Bibliographic Details
Application Number
—
Jurisdiction
DE
Data Source
google_patents
Last Synchronized
2026-11-08 18:41
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/12; G01P15/123; G01P15/0802; G01P2015/0805; G01P2015/0822; G01P2015/0825; G01P2015/0828
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
DE3837883A1
Cited
FR2627592A1
Cited
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.