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Browse, filter, and analyze 3 patents across global jurisdictions.

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Patent Number Title Assignee Status Filing Date Grant Date Expires Remaining Claims Actions
US3347772A Rf sputtering apparatus including a capacitive lead-in for an rf potential GT Schjeldahl Co Expired / Lapsed 1964-03-02 1967-10-17 1984-03-02 0.0 yrs 2
US3324019A Method of sputtering sequentially from a plurality of cathodes GT Schjeldahl Co Expired / Lapsed 1962-12-11 1967-06-06 1982-12-11 0.0 yrs 2
US3296115A Sputtering of metals wherein gas flow is confined to increase the purity of deposition GT Schjeldahl Co Expired / Lapsed 1964-03-02 1967-01-03 1984-03-02 0.0 yrs 2