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Zygo Corp

Zygo Corp
Active Patents
0
Total Holdings
3

Patent Holdings

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Patent No. Title Status Filing Date Grant Date Claims Actions
US3977789A Scanning differential photoelectric autocollimator Expired / Lapsed 1975-04-07 1976-08-31 7 Details
US3907439A Edge-sensing with a scanning laser beam Expired / Lapsed 1974-04-24 1975-09-23 3 Details
US3885875A Noncontact surface profilometer Expired / Lapsed 1974-07-29 1975-05-27 5 Details